Epitaxial growth of Bi 2 Sr 2−x La x CuO 6+δ thin films by RF-magnetron sputtering

y z zhang,li li,d g yang,b r zhao,hanlin chen,chunhua dong,h j tao,h t yang,s l jia,b yin,j w li,z x zhao
DOI: https://doi.org/10.1016/S0921-4534(97)01719-X
IF: 1.534
1998-01-01
Physica C: Superconductivity and its Applications
Abstract:Superconducting Bi2Sr2-xLaxCuO6+delta thin films were successfully deposited on (100) LaAlO3 and (100) SrTiO3 substrates by in situ RF-magnetron sputtering. The highest zero resistance temperature T-c0, reached 29 K. The film morphology is shown to be related with the sputtering gas pressure. The microstructures. of the films show ab-twinning. Atomic force microscopy image showed the films grow as terrace islands with no screw dislocation. For obtaining high quality La-2201 superconducting thin films, the sputtering gas pressure should be higher, and the compositions of the targets have to be modified by trial and error. (C) 1998 Elsevier Science B.V.
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