Abstract:The stability and lifetime of electrical contact pose a major challenge to the performance of microelectro-mechanical systems (MEMS), such as MEMS switches. The microscopic failure mechanism of electrical contact still remains largely unclear. Here conductive atomic force microscopy with hot switching mode was adopted to simulate the asperity-level contact condition in a MEMS switch. Strong variation and fluctuation of current and adhesion force were observed during 10,000 repetitive cycles, exhibiting an “intermittent failure” characteristic. This fluctuation of electrical contact properties was attributed to insulative carbonaceous contaminants repetitively formed and removed at the contact spot, corresponding to degradation and reestablishment of electrical contact. When contaminant film was formed, the contact interface became “metal/carbonaceous adsorbates/metal” instead of direct metal/metal contact, leading to degradation of the electrical contact state. Furthermore, a system of iridium/graphene on ruthenium (Ir/GrRu) was proposed to avoid direct metal/metal contact, which stabilized the current fluctuation and decreased interfacial adhesion significantly. The existence of graphene enabled less adsorption of carbonaceous contaminants in ambient air and enhanced mechanical protection against the repetitive hot switching actions. This work opens an avenue for design and fabrication of microscale electrical contact system, especially by utilizing two-dimensional materials.

Study on Stiction of Microstructure in MEMS

Control of Micro Stick-Slip and Stiction in MEMS

Study on the design of anti-sticking structures in MEMS under different forces

Adhesion-Induced Failure of the Slender Mems Structures

Mechanical stability and sticking problem of a membrane strip structure in MEMS under Casimir forces

Theoretical Study of the Sticking of a Membrane Strip in MEMS under the Casimir Effect

Capillary Adhesion Between the Micro-Cantilever and the Substrate

Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope

Friction and wear properties in MEMS

Friction and Wear Properties of Microstructures in MEMS

The Surface Energy and Nano-Adhesion Behavior of Some Micro-Component Material in Mems

Intermittent Failure Mechanism and Stabilization of Microscale Electrical Contact

RESIDUAL STRESSES IN MICRO-ELECTRO-MECHANICAL SYSTEMS

Reducing the Adhesion and Friction Forces of Si by Coating Ultra-Thin Al2o3 Films

Interfacial properties for real rough MEMS/NEMS surfaces by incorporating the electrostatic and Casimir effects-a theoretical study

Bonding Strength at Micro and Nano Levels

Investigation on Adhesion Work and Its Effects on Micro Friction

DETERMINATION OF MECHANICAL BEHAVIOR OF MEMS MATERIALS

Measurement of Residual Stress of MEMS Materials

An experimental study on the influence of humidity on ice adhesion strength on superhydrophobic surfaces with microstructures