Reducing the Adhesion and Friction Forces of Si by Coating Ultra-Thin Al2o3 Films

Zhimin Chai,Yuhong Liu,Xinchun Lu,Dannong He

DOI: https://doi.org/10.1039/c4ra06379a

IF: 4.036

2014-01-01

RSC Advances

Abstract:Si-based microelectromechanical system (MEMS) devices cannot run reliably because of their poor tribological performance.

What problem does this paper attempt to address?

Characterization and Tribological Behavior of Octadecene, Dodecene and Undecenoic Acid Films on Si Substrate

JF Zhou,SR Yang

2005-01-01

Abstract:The films of octadecene, dodecene, and undecenoic acid were prepared on H-terminated Si surface in the presence of ultraviolet irradiation. The resulted films were characterized with water-contact angle measurement and infrared spectroscopy. The friction-reducing behavior of the prepared films was examined on a static-dynamic friction coefficient measurement apparatus and on an atomic force microscope. It was found that all the reacted films on the Si substrate showed good friction-reducing ability; especially, the film of the octadecene exhibited the best frictionreducing ability. This was attributed to the transfer of the reacted films onto the counter face with formation of a transfer film on the counterpart surface, which led to the transformation of the sliding between the reacted films and the hard ceramic to that between the reacted films and its transfer film on the counterpart surface. The macroscopic and microscopic friction behaviors of the prepared films were dependent on their molecular chain lengths. Thus the octadecene reacted film with the highest degree of ordering arrangement showed the best friction-reducing and antiwear abilities in sliding against Si3N4.
Nanotribological Behavior of Ultra-thin Al 2 O 3 Films Prepared by Atomic Layer Deposition

Zhimin Chai,Yuhong Liu,Xinchun Lu,Dannong He

DOI: https://doi.org/10.1007/s11249-014-0341-0

2014-01-01

Tribology Letters

Abstract:Si-based nano/micro-electromechanical system (NEMS/MEMS) devices with contacting and rubbing structures cannot run reliably due to their poor tribological performance. A thin alumina (Al 2 O 3 ) film is a promising candidate for the protective coating in the applications of NEMS/MEMS devices. In this study, nanotribological behavior of ultra-thin Al 2 O 3 films prepared by atomic layer deposition on a Si (100) substrate was investigated in comparison with that of Si (100). X-ray photoelectron spectroscopy was used to determine the composition of Al 2 O 3 films. Atomic force microscopy with different tips was employed to measure the scratch resistance, adhesion and friction forces of various samples. The results show that Al 2 O 3 films have larger scratch resistance than that of Si (100). In addition, the adhesion and friction forces of Al 2 O 3 films are smaller than that of Si (100). Thus, the Al 2 O 3 films are capable of a wide application in Si-based NEMS/MEMS devices. The improved tribological performance of Al 2 O 3 films is attributed to their hydrophobic properties.
Friction and Wear Studies of Octadecyltrichlorosilane SAM on Silicon

Sili Ren,Shengrong Yang,Yapu Zhao,Jinfang Zhou,Tao Xu,Weimin Liu

DOI: https://doi.org/10.1023/A:1021076824408

2002-01-01

Tribology Letters

Abstract:A self-assembled monolayer of octadecyltrichlorosilane (OTS) was prepared on a single-crystal silicon wafer (111) and its tribological properties were examined with a one-way reciprocating tribometer. The worn surfaces and transfer film on the counterface were analyzed by means of scanning electron microscopy and X-ray photoelectron spectroscopy. The results show that, due to the wear of the OTS monolayer and the formation of the transfer film on the counterpart ball, the friction coefficient gradually increases from 0.06 to 0.13 with increasing sliding cycles and then keeps stable at a normal load of 0.5N. The transfer film is characterized by deposition, accumulation, and spalling at extended test duration. Though low friction coefficients of the monolayer in sliding against steel or ceramic counterfaces are recorded, poor load-carrying capacity and antiwear ability are also shown. Moreover, the monolayer itself or the corresponding transfer film on the counterface fails to lubricate even at a normal load of 1.0N. Thus, the self-assembled monolayer of octadecyltrichlorosilane can be a potential boundary lubricant only at very low loads.
Reducing Friction Force of Si Material by Means of Atomic Layer-Deposited ZnO Films

Zhimin Chai,Yuhong Liu,Xinchun Lu,Dannong He

DOI: https://doi.org/10.1007/s11249-014-0383-3

2014-01-01

Tribology Letters

Abstract:With excellent lubricating property, zinc oxide (ZnO) films are promising candidates to act as protective coatings in Si-based microelectromechanical system devices for the purpose of decreasing friction forces of silicon (Si) material. In this paper, the nanotribological behavior of ZnO films prepared by atomic layer deposition on a Si (100) substrate is investigated by an atomic force microscope. The ZnO films have various thicknesses ranging from 10.0 to 182.1 nm. With the increase of film thickness, the root-mean-square roughness of the films increases, while the ratio of hardness to Young’s modulus ( H/E ) decreases. Due to their large surface roughness, the thick ZnO films are low in adhesion force. The friction force of the ZnO films is smaller than that of the Si (100) substrate and is greatly influenced by their adhesion force and mechanical property. In a low-load condition, the friction force is dominated by the adhesion force, and thus, the friction force of the ZnO films decreases as film thickness increases. While in a high-load condition, the friction force is dominated by plowing. Films with higher H/E possess smaller friction force, and thus, the friction force increases with the decreasing film thickness.
Friction and wear properties in MEMS

Weiyuan Wang,Yuelin Wang,Haifei Bao,Bin Xiong,Minhang Bao

DOI: https://doi.org/10.1016/S0924-4247(01)00821-4

2002-01-01

Abstract:Recent researches on friction and wear in MEMS were reviewed and discussed in this paper. Friction, a major problem for many micro actuators in MEMS, has been actively investigated based on the results from both scientific instruments and microstructures of practical dimensions. The surface effects influencing the frictional behavior in MEMS were discussed. Based on the proposed differential friction coefficient, the expressions for friction, the friction properties for micro and macro scales were compared. The measures to reduce the friction and wear in MEMS were also discussed.
Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope

Jianning Ding,Guoxin Xie,Zhen Fan,Ping Yang,Quan Wang

DOI: https://doi.org/10.1109/NEMS.2006.334651

2006-01-01

Abstract:A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force of OTS film is much smaller the one of Si (100) substrate which leads to a relatively low friction coefficient, thereby the OTS film presents better lubricant performance; Besides, the Si(100) substrate is much more affected by the variation of humidity than OTS film; The velocity effect on the frictional performance is more significant for Si(100) component due to the Si(OH)4 lubricant film caused by the tribo-chemical reaction. A thermally activated capillary condensation model while taking the surface roughness effect into consideration is also adopted to explain the humidity and velocity effects on the adhesive and tribological properties theoretically. In addition, the durability tests indicate that the OTS lubricant film exhibits not only better wearability but also stability comparatively
Reducing adhesion force by means of atomic layer deposition of ZnO films with nanoscale surface roughness.

Zhimin Chai,Yuhong Liu,Xinchun Lu,Dannong He

DOI: https://doi.org/10.1021/am4053333

IF: 9.5

2014-01-01

ACS Applied Materials & Interfaces

Abstract:Adhesion is a big concern for the design of Si-based microelectromechanical devices. A ZnO film with nanoscale surface roughness is a promising candidate to decrease adhesion as the protective coating. In this study, the adhesion force of ZnO films prepared by atomic layer deposition (ALD) on a Si (100) substrate was studied. The root-mean-square (RMS) roughness of the ZnO films was in the range of 0.7-4.28 nm, and the contact angle of water was in the range of 85-88°. The adhesion force was measured by atomic force microscopy (AFM) at both low (12%) and high (60%) relative humidities. The results show that the adhesion force decreases as the surface roughness increases. A low adhesion force at high RMS roughness is attributed to the large asperities on the film, and a large adhesion force at high humidity is attributed to the large capillary force. The experimental adhesion force was compared to the force calculated using the Rabinovich model. Although the theoretical value underestimates the experimental value, the proportion of the two components of the adhesion force is clearly shown. At the low humidity, the van der Waals force component differs not greatly with the capillary force component, while at the high humidity, the capillary force component becomes dominant.
Characterisation Of Tribological Behaviour Of Silicon And Ceramic Coatings Under Repeated Sliding At Micro-Scale

H. R. Le,J. A. Williams,J. K. Luo

DOI: https://doi.org/10.1504/IJSURFSE.2008.018964

2008-01-01

International Journal of Surface Science and Engineering

Abstract:Because of large surface-to-volume ratios and low restoring forces, surface stiction and friction can dominate the performance of Micro-Electro-Mechanical Systems (MEMS) currently being developed. To achieve the functionality and reliability of these devices, tribologists strive to understand the mechanisms of adhesion, friction and wear over a broad range of length scales. This paper presents the design and commission of a simple tribological test rig for the characterisation of MEMS materials from micro-scale to meso-scale. The effects of normal load, environment and various coatings on the friction and wear are explored using this rig.
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan,M.R. Houston,R.T. Howe,R. Maboudian

DOI: https://doi.org/10.1109/84.679393

IF: 2.829

1998-06-01

Journal of Microelectromechanical Systems

Abstract:We have investigated the potential of self-assembled monolayer (SAM) coatings for the purpose of adhesion reduction in microelectromechanical systems (MEMS). Two types of SAM coatings, derived from the precursor molecules octadecyltrichlorosilane [CH/sub 3/(CH/sub 2/)/sub 17/SiCl/sub 3/, OTS] and 1H,1H,2H,2H-perfluorodecyltrichlorosilane [CF/sub 3/(CF/sub 2/)/sub 7/(CH/sub 2/)/sub 2/SiCl/sub 3/, FDTS], were applied to polycrystalline silicon microstructures in a liquid-based process. Due to the hydrophobicity of these coatings, the water capillary forces responsible for the phenomenon known as release-related stiction are eliminated, and SAM-coated cantilever beams 2 /spl mu/m thick, 2 /spl mu/m above the substrate, and up to 2 mm in length emerge dry and free standing when removed from the final water rinse. The effects of SAM coating on adhesion encountered during device operation, termed in-use stiction, were characterized using arrays of cantilever beams of varying lengths. Structures made with a polycrystalline silicon of 3-nm rms roughness gave apparent works of adhesion of 30 and 8 /spl mu/J/m/sup 2/ for the OTS and FDTS SAM coatings, respectively, in comparison to 56 mJ/m/sup 2/ for standard oxide-coated structures. These results demonstrate that OTS coating reduces adhesion by more than three orders of magnitude over the conventional process and that the fluorinated SAM can lessen it further by four times. With regard to thermal stability, both SAM coatings can withstand heat treatment for 5 min at 450/spl deg/C in an N/sub 2/ ambient. In air, the OTS film begins to degrade at 150/spl deg/C while the fluorinated coating remains intact up to 400/spl deg/C. Therefore, both types of SAM coatings are compatible with several MEMS packaging techniques, with the FDTS monolayers exhibiting superior stiction and thermal stability properties to those derived from OTS. Furthermore, the FDTS formation does not require any chlorinated solvents such as carbon tetrachloride, which has been banned from industrial use, making the latter coating an industrially viable antistiction treatment.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Structural and Environmental Dependence of Superlow Friction in Ion Vapour-Deposited A-C : H : Si Films for Solid Lubrication Application

Xinchun Chen,Takahisa Kato,Masahiro Kawaguchi,Masataka Nosaka,Junho Choi

DOI: https://doi.org/10.1088/0022-3727/46/25/255304

2013-01-01

Journal of Physics D Applied Physics

Abstract:Understanding the tribochemical interaction of water molecules in humid environment with carbonaceous film surfaces, especially hydrophilic surface, is fundamental for applications in tribology and solid lubrication. This paper highlights some experimental evidence to elucidate the structural and environmental dependence of ultralow or even superlow friction in ion vapour-deposited a-C : H : Si films. The results indicate that both surface density of silicon hydroxyl group (Si-OH) and humidity level (RH) determine the frictional performance of a-C : H : Si films. Ultralow friction coefficient mu (similar to 0.01-0.055) is feasible in a wide range of RH. The dissociative formation of hydrophilic Si-OH surface and the following nanostructure of interfacial water molecules under contact pressure are the origin of ultralow friction for a-C : H : Si films in humid environment. The correlation between contact pressure and friction coefficient derived from Hertzian contact model is not valid in the present case. Under this nanoscale boundary lubrication, the friction coefficient tends to increase as the contact pressure increases. There even exists a contact pressure threshold for the transition from ultralow to superlow friction (mu similar to 0.007). In comparison, when tribotested in dry N-2, the observed superlow friction (mu similar to 0.004) in the absence of water is correlated with the formation of a low shear strength tribolayer by wear-induced phase transformation.
Investigation on microtribological behavior of thin films using friction force microscopy

Xin-Chun Lu,Bing Shi,Lawrence K.Y Li,Jianbin Luo,Jihui Wang,Hengde Li

DOI: https://doi.org/10.1016/S0257-8972(00)00602-2

IF: 4.865

2000-01-01

Surface and Coatings Technology

Abstract:A purpose-built atomic force and friction force microscope (AFM/FFM) was employed to study micro friction and wear behavior of thin films of Langmiur–Blodgett (L–B), gold (Au), polytetrafluoroethylene (PTFE), silicon nitride (Si3N4) and PTFE/Si3N4 multi-layers prepared by different deposition techniques. The results show that the L–B film has a low friction coefficient but can be worn easily under a light load less than 20 nN; Au film and silicon wafer has a higher friction coefficient than that of L–B film and can be worn under a higher load of approximately 50 nN; the PTFE/Si3N4 multilayer has a lower friction coefficient than that of Si3N4 and has a higher micro wear resistance than that of PTFE. The friction force of the PTFE/Si3N4 multilayer is linear with the load at the nanometer scale. The worn track is formed in PTFE film and PTFE/Si3N4 multilayers when the load is greater than 70 nN.
Friction and fracture properties of polysilicon coated with self-assembled monolayers

J.N. Ding,P.L. Wong,J.C. Yang

DOI: https://doi.org/10.1016/j.wear.2005.02.060

IF: 4.695

2006-01-01

Wear

Abstract:The increasing use of small micromechanical devices and advanced sensors has led to concern about the failure modes and reliability of these structures. The enormous promise will not materialize without substantial progress in overcoming the stiction, friction and wear associated with such devices and understanding the mechanical behavior of MEMS materials and structures. Self-assembled monolayers (SAMs) are release and anti-stiction coatings for MEMS. In this paper, the anti-stiction properties of octadecyltrichlorosilane (OTS) SAM were calculated. The microtribological properties of OTS SAM were investigated with a ball-on-flat microtribometer. The influence of OTS SAM on the mechanical properties of micromachined polysilicon films for MEMS was investigated with an accurate evaluation using the microtensile test device. It was concluded that the OTS SAM has good anti-stiction properties and low friction coefficients. The hydrophobic property of OTS is the main factor leading to an increase in the average fracture strength of micromachined polysilicon up to 32.46%. Thus, the operational stability and lifetime of MEMS can be raised when coated with self-assembled monolayers.

engineering, mechanical,materials science, multidisciplinary
Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating

Ian Laboriante,Anton Suwandi,Carlo Carraro,Roya Maboudian

DOI: https://doi.org/10.1016/j.sna.2013.01.036

2013-04-01

Abstract:The contacting surfaces of a microfabricated polycrystalline silicon (polysilicon) double-clamped beam adhesion test structure have been modified with a thin ultra-hard, wear-resistant, and conformal silicon carbide (SiC) film. Adhesion forces in SiC-coated interfaces as a function of apparent area of contact have been determined quantitatively and compared with those in uncoated polysilicon contacts. Furthermore, contact reliability studies have been carried out by following the changes in physicochemical properties of the surfaces after >100 billion contact cycles. The results highlight the tribological benefits of SiC coating as a solid lubricant in devices undergoing cyclic contacts.
Self-organized transfer film-induced ultralow friction of Graphene/MoWS4 heterostructure nanocomposite

Kexin Ren,Guomin Yu,Zhenxi Zhang,Wenchao Wu,Pei Tian,Muhammad Chhattal,Zhenbin Gong,Yan Li,Junyan Zhang

DOI: https://doi.org/10.1016/j.apsusc.2021.151443

IF: 6.7

2022-01-01

Applied Surface Science

Abstract:We report the tribological performance evaluation of Graphene/MoWS4 heterostructure nanocomposite prepared via simple spin-coating to lubricate the silicon-based MEMS devices. The lubrication mechanism of the nanocomposite was studied by a ball-on-disk tribometer, a three-dimensional surface profilometer, and high-resolution characterization techniques. The results show that the coefficient of friction was reduced from 0.4 to an ultralow friction level (μ ∼ 0.02), and the specific wear rate of the silicon substrate was reduced by 3 orders of magnitude due to the lubricating effect and formation of transfer film of the nanocomposite. High-resolution characterization confirmed the formation of beneficial transfer film, indicating that the nanostructured graphene and MoWS4 were completely mixed in the transfer film. The transfer film enables the formation of low-friction contact by transferring the direct interaction of steel/silicon into an easy sliding steel/transfer film/silicon contact. Furthermore, the particular stacking and orientation of the nanosheets revealed the structural mechanism of ultralow friction.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
Achieving superlubricity and high adhesion strength of hydrogenated amorphous carbon film with Al/Cr/Si-doping

Quansheng Ma,Yongqiang Fu,Yi Xu,Tianbao Ma

DOI: https://doi.org/10.1016/j.carbon.2023.118424

IF: 10.9

2023-01-01

Carbon

Abstract:Excellent tribological properties of hydrogenated amorphous carbon films make it an important candidate for friction reduction in industry. However, the great challenge of achieving both high adhesion strength and super-low friction limits its wide applications. In this work, a novel Al, Cr and Si co-doped hydrogenated amorphous carbon (AlCrSi/a-C:H) film was prepared by high-power impulse magnetron sputtering (HiPIMS) method. The AlCrSi/a-C:H film showed favorable mechanical performance and high adhesion (similar to 80 N), which was attributed to the controlled elements doping and special transition layers produced by HiPIMS method. Meanwhile, superlubricity was obtained with coefficient of friction 0.0014. Detailed characterizations suggested that doping elements played significant roles in tribo-chemical reactions during friction. On one hand, doping elements can promote shear-induced graphitization and formation of graphite-like layers at the friction interface. On the other hand, the preferential oxidation of doping elements can protect the formed graphite-like layers from oxidation and the formed oxides nanoparticles can also be wrapped by carbon layers to prevent abrasive wear. It was the synergistic effects of graphitization and oxidation actions that led to superlubricity state of the film. The proposed AlCrSi/a-C:H film architecture with strong adhesion and superlubricity properties provides design criteria of superlubricious films for industrial applications.
Friction and Wear Properties of Microstructures in MEMS

Weiyuan Wang,Yuelin Wang,Haifei Bao,Bin Xiong,Minhang Bao

DOI: https://doi.org/10.1007/978-3-642-59497-7_312

2001-01-01

Abstract:Friction and wear has been a major problem for many micro actuators. The friction and wear properties in micro scale have been investigated experimentally by many research institutions using both scientific instrumentation and microstructures of practical dimensions. Based on the experimental results, models for micro friction are discussed and the different friction properties for micro and macro scales are compared. The measures to mitigate the friction and wear problem are introduced.
Microstructure, Mechanical and Tribological Properties of CrSiC Coatings Sliding Against SiC and Al2O3 Balls in Water

Zhiwei Wu,Fei Zhou,Kangmin Chen,Qianzhi Wang,Zhifeng Zhou,Jiwang Yan,Lawrence Kwok-Yan Li

DOI: https://doi.org/10.1016/j.apsusc.2016.01.276

IF: 6.7

2016-01-01

Applied Surface Science

Abstract:CrSiC coatings with different silicon contents were prepared using unbalanced magnetron sputtering via adjusting trimethylsilane (Si(CH3)(3)H) flows. Their phase structure, bonding structure, microstructure and hardness were characterized by X-ray diffraction (XRD), X-ray photoelectrons spectroscopy (XPS), a field emission scanning electron microscope (FESEM) and nano-indenter, respectively. The tribological properties of CrSiC coatings sliding against SiC and Al2O3 balls were investigated in water. The results showed that the CrSiC coatings were speculated to be X-ray amorphous. Although the hardness of coatings fluctuated slightly (13.2-13.8 GPa), the coatings showed poor wear resistance due to the decline of the crack resistance and toughness. Moreover, the friction coefficient (0.24-0.31) and the wear rate (2.97-7.66 x 10(-6) mm(3)/Nm) of CrSiC/SiC trobopairs were lower than those of CrSiC/Al2O3 tribopairs. (C) 2016 Elsevier B.V. All rights reserved.
An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Zhanshe Guo,Yonggang Meng,Caijun Su,Hao Wu

DOI: https://doi.org/10.1007/s00542-007-0413-2

2007-01-01

Microsystem Technologies

Abstract:An on-chip micro-tribotester has been developed to investigate the friction and wear properties on side contacting surfaces of single crystal silicon that is most widely used in usual microelectromechanical systems actuators. The device is fabricated with standard bulk silicon process and bonding technology based on parameters that have been theoretically calculated to get the stiffness and friction forces. In this device, two comb shuttles are used. One comb shuttle is used to contact the friction surfaces under a certain normal load. The other comb shuttle moves back and forth to provide relative motion between the two friction surfaces. The tested two surfaces are the top surface of an anchor with rounded end and the lateral surface of a beam that has been connected to the two comb shuttles. Tribology experiments on the etched silicon surfaces that are side contacted have been carried out. Friction coefficients testing results suggest that dynamic friction coefficient is about 0.31–0.33 and the obtained static friction coefficient increases with the decrease of normal force. Wear experiment indicates that oxidation happens between the rubbing surfaces during the course of the testing. Wear debris is collected as agglomerates because of the function of adhesion force and water vapor and the agglomerates that are collected on top and lateral surfaces are of different shapes.
A Computational Chemistry Approach for Investigation of Low Friction Mechanisms Based on FEP Film with Functionalized SiO2 Nanoparticles

Marleen de Weser,G. Schottner,Y. Morita

DOI: https://doi.org/10.4028/WWW.SCIENTIFIC.NET/AMR.1119.142

2015-07-01

Abstract:To improve the fuel efficiency of automobile internal combustion engines, we investigated the fundamental mechanism of friction reduction within engine moving parts. A new coating was designed by introducing SiO2 nanoparticles in FEP film. The SiO2 nanoparticles were functionalized with hydrophobic fluoroalkyl units on their surface to create additional low friction property. Universal Surface Tester friction measurements revealed a significant reduction of the friction coefficient with increasing number of hydrophobic fluoroalkyl units for SiO2 surface functionalization. To clarify the friction reduction mechanisms by the functionalization of SiO2 nanoparticles, a quantum chemical calculation was carried out. The result indicates that an attractive force occurs between nanoparticle Si atoms and polymer F atoms, while by adding fluoroalkyl units on the SiO2 nanoparticle surface, this force changes to repulsive. By performing a molecular dynamics simulation of a shear model between FEP film and SiO2 nanoparticles, we observed a decrease of friction force with increasing fluoroalkyl units which lead smooth rolling motion of nanoparticles, thus confirming the repulsive effect of nanoparticle functionalization. We conclude that fluoroalkyl units on the SiO2 surface play an important role in creating a repulsive force between nanoparticle and FEP film which lead to low friction coefficient.

Chemistry,Engineering,Materials Science
Ni/Si3N4 composite coatings and their water lubrication behaviors

Liang Huang,Qingwen Dai,Wei Huang,Xiaolei Wang

DOI: https://doi.org/10.1016/j.apsusc.2021.151534

IF: 6.7

2022-01-01

Applied Surface Science

Abstract:In view of the excellent water lubrication performance of Si3N4, the composite coatings of Ni/Si3N4 with different Si3N4 particle contents were fabricated and the ultra-low friction coefficient of the coatings sliding against Si3N4 ball in water was expected. Experimental results manifested that only the Ni/Si3N4 composite coatings with a high particle content can achieve the ultra-low friction coefficient (0.008). The SEM and 3Dprofiler measurements indicated that the formation of consecutive and smooth contact interface is one of the essential conditions to achieve the ultra-low friction. Besides, the tribo-chemical product, silicon hydroxide, is another requirement. The major wear mechanism changes from the mechanically dominated wear during the running-in process to the tribo-chemical wear at the ultra-low frictional stage. Such result indicates that low friction is not a specific feature of Si3N4 and SiC self-mated pairs. This behavior of ceramic composite coating may develop a new approach for the low energy loss water lubrication systems.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films

Reducing the Adhesion and Friction Forces of Si by Coating Ultra-Thin Al2o3 Films

Characterization and Tribological Behavior of Octadecene, Dodecene and Undecenoic Acid Films on Si Substrate

Nanotribological Behavior of Ultra-thin Al 2 O 3 Films Prepared by Atomic Layer Deposition

Friction and Wear Studies of Octadecyltrichlorosilane SAM on Silicon

Reducing Friction Force of Si Material by Means of Atomic Layer-Deposited ZnO Films

Friction and wear properties in MEMS

Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope

Reducing adhesion force by means of atomic layer deposition of ZnO films with nanoscale surface roughness.

Characterisation Of Tribological Behaviour Of Silicon And Ceramic Coatings Under Repeated Sliding At Micro-Scale

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

Structural and Environmental Dependence of Superlow Friction in Ion Vapour-Deposited A-C : H : Si Films for Solid Lubrication Application

Investigation on microtribological behavior of thin films using friction force microscopy

Friction and fracture properties of polysilicon coated with self-assembled monolayers

Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating

Self-organized transfer film-induced ultralow friction of Graphene/MoWS4 heterostructure nanocomposite

Achieving superlubricity and high adhesion strength of hydrogenated amorphous carbon film with Al/Cr/Si-doping

Friction and Wear Properties of Microstructures in MEMS

Microstructure, Mechanical and Tribological Properties of CrSiC Coatings Sliding Against SiC and Al2O3 Balls in Water

An on-chip micro-friction tester for tribology research of silicon based MEMS devices

A Computational Chemistry Approach for Investigation of Low Friction Mechanisms Based on FEP Film with Functionalized SiO2 Nanoparticles

Ni/Si3N4 composite coatings and their water lubrication behaviors