Abstract:In this work we studied the fabrication of a monolithic bimaterial micro-cantilever resonant IR. sensor with on-chip drive circuits. The effects of high temperature process and stress induced performance degradation were investigated. The post-CMOS MEMS (micro electro mechanical system) fabrication process of this IR. sensor is the focus of this paper, starting from theoretical analysis and simulation, and then moving to experimental verification. The capacitive cantilever structure was fabricated by surface micromachining method, and drive circuits were prepared by standard CMOS process. While the stress introduced by MEMS films, such as the tensile silicon nitride which works as a contact etch stopper layer for MOSFETs and releasing stop layer for the MEMS structure, increases the electron mobility of NMOS, PMOS hole mobility decreases. Moreover, the NMOS threshold voltage(Vth) shifts, and transconductance (Gm) degrades. An additional step of selective removing silicon nitride capping layer and polysilicon layer upon IC area were inserted into the standard CMOS process to lower the stress in MOSFET channel regions. Selective removing silicon nitride and polysilicon before annealing can void 77% Vth shift and 86% Gm loss.

A Monolithic Integrated CMOS Thermal Vacuum Sensor

A CMOS Temperature Sensor with Versatile Readout Scheme and High Accuracy for Multi-Sensor Systems

Monolithic Integration Of Gas/Humidity/Temperature Sensors With Thermal Coupling Effect Reduction

A Novel Monolithically Integrated Pressure, Accelerometer and Temperature Composite Sensor

Integration of infrared sensor and pressure/humidity/temperature cmos-mems environmental sensing hub by local vacuum packaging

A MEMS-Type Ionization Vacuum Sensor with a Wide Measurement Range

Monolithic Integration of Multiple Sensors on a Single Silicon Chip

Optical Temperature Sensor Based on Polysilicon Waveguides

Monolithic Integration of a Flexible Micro Thermal Flow Sensor

A MEMS-Type Ionization Vaccum Sensor Based on an On-Chip Thermionic Electron Source

Fabrication of monolithic integrated bimaterial resonant uncooled IR sensor

A CMOS MEMS Pirani vacuum gauge with complementary bump heat sink and cavity heater

A Novel Dual-Functional MEMS Sensor Integrating Both Pressure and Temperature Units

A Novel Combined Pressure/Temperature Microsensor

Monolithic Integrated CMOS-MEMS Fluorescence Quenching Gas Sensor and Resistive Temperature Detector (RTD) for Temperature Compensation

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

A New Type of CMOS Temperature Sensor

A MEMS Thermopile Pirani Sensor Integrated With Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment

Compact Micro Thermal Sensor Based on Silicon Thermocouple Junction and Suspended Fluidic Channel

A novel built-in CMOS sensor for on-line thermal monitoring of VLSI circuits