Analysis of Ion-Induced Auger Emission: Components and Their Intensities

M LU,QJ ZHANG
DOI: https://doi.org/10.1016/0039-6028(94)90292-5
IF: 1.9
1994-01-01
Surface Science
Abstract:Ion-induced Auger electron spectra (IAES) differ from conventional electron-induced ones in their line shapes. The identification of IAES structures of Mg, Al and Si has long been in dispute especially regarding whether the so-called bulk-like structure results from the decay in the bulk solely or partially. In this paper we give a detailed analysis of line shapes of IAES of Si and Al in different chemical environments by using a curve-fitting method along with the technique of work-function variation. It shows that in different chemical environments the bulk-like structure is always composed of a true bulk component and an atomic component, which indicates that this structure is not of pure bulk origin. Also it shows that the percent weight (PW) of the bulk component contributing to IAES depends not only on the Si or Al concentration, but also on the work function of the sample. The PW ratio of atomic components from excited ions to those from excited neutral atoms depends on the work function as well, which implies the existence of the tunneling effect.
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