Study on the Properties of AlF3-MgF2-SiO2 System Low Temperature Co-Fired Oxyfluoride Glass-Ceramics

王睿,周济,李龙土,李勃
DOI: https://doi.org/10.3969/j.issn.1001-2028.2008.06.005
2008-01-01
Abstract:The AlF3-MgF2-SiO2 low temperature co-fired oxyfluoride glass-ceramic system was prepared,and the sintering behavior,microstructure,dielectric properties and co-fired property with Ag electrode paste were studied by XRD、 SEM and impedance analytic meter etc.The results show that the oxyfluoride glass-ceramic material can be sintered at 900 ℃ with relative low dielectric constant(6.2),low dielectric loss(0.002),low thermal expansion coefficient(7.4 ×10–6/K),high bending strength(220 MPa) and high thermal conductivity 2.4 [W/(m.K)],the ceramics could be co-fired with silver electrode paste well.It is promising as a candidate of new dielectric material for LTCC substrate or passive integration.
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