CaF2–AlF3–SiO2 Glass-Ceramic with Low Dielectric Constant for LTCC Application

Rui Wang,Ji Zhou,Bo Li,Longtu Li
DOI: https://doi.org/10.1016/j.jallcom.2009.09.031
IF: 6.2
2010-01-01
Journal of Alloys and Compounds
Abstract:Low temperature co-fired ceramic (LTCC) materials based on CaF2–AlF3–SiO2 oxyfluoride glass-ceramics were prepared. The sintering behaviors, phase transition, microstructures, and the dielectric properties of the glass-ceramics, as well as their compatibility with Ag electrode were investigated systematically. It was revealed that the oxyfluoride glass-ceramics could be sintered at 800–825°C. Moreover, as-prepared glass-ceramics exhibited low dielectric constant (5.93–4.93), low dielectric loss (<1×10−3), sufficient mechanical strength (>150MPa), proper thermal expansion coefficient (8.4–6.0ppm/°C) and good sintering compatibility with silver electrode, which provided promising candidates for LTCC application.
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