Atomic-Scale Microstructures Of Srbi2ta2o9 (Sbt) Ferroelectric Thin Films Prepared By Mod And Pld For Ferams Applications

Xinhua Zhu,Tao Zhu,Aidong Li,Tao Yu,Zhguo Liu,Naiben Ming
DOI: https://doi.org/10.1080/10584580008215653
2000-01-01
Integrated Ferroelectrics
Abstract:In this work, the microstructural defects in SrBi2Ta2O9 (SBT) ferroelectric thin films were investigated at the atomic-scale by high-resolution transmission electron microscopy (HRTEM). A stacking fault with an extra inserted Bi-O plane normal to the c-axis was observed in SET film with 10mol% excess bismuth prepared by metalorganic deposition. Edge dislocations with an average space about 3nm were observed at the small misorientation angle (8.2 degrees) tilt grain boundary of SET film with (001)-orientation prepared by pulsed laser deposition. The Burgers vector b for the edge dislocation was determined to be 1/2[110]a(0), where ao is the parameter of SET unit cell. Chemical compositions of grains and grain boundaries in SET films annealed in forming gas at 450 degreesC and 500 degreesC for 60 minutes were analyzed by using energy dispersive spectra at the nano-scale. Effects of the microstructural defects and microchemistry of the grain boundaries on the leakage current of SET films are briefly discussed.
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