Abstract:A high-overtone bulk acoustic resonator (HBAR), in which a piezoelectric transducer is set on an acoustic cavity, has been attracting attention in both fundamental research and RF applications due to its scalability, high frequency, and high quality factor. The acoustic impedance matching in HBARs is crucial for efficient acoustic power transfer from the piezoelectric transducer to the cavity. However, impedance mismatch remains in most HBARs due to the metal layer insertion between the piezoelectric layer and cavity substrate. In this study, we fabricated a nearly impedance-matched high-quality HBAR using an epitaxial AlN piezoelectric layer directly grown on a conductive SiC cavity substrate with no metal layer insertion. The small impedance mismatch was verified from the variation in the free spectral range (FSR), which is comparable to the best value in previously reported HBARs. The experimentally obtained FSR spectra was greatly reproduced by using the Mason model. Broadband phonon cavity modes up to the K-band (26.5 GHz) were achieved by reducing the thickness of the AlN layer from 800 to 200 nm. The high figure of merit of $f\times\text{Q} \sim 1.3\times 10^{13}\ \textrm{Hz}$ at 10 GHz was also obtained. Our nearly impedance-matched high-quality HBAR will enable the development of RF applications, such as low-phase noise oscillators and acoustic filters, as well as research on high-frequency acoustic systems hybridized with electric, optical, and magnetic systems.

Parameter Characterization of High-Overtone Bulk Acoustic Resonators by Resonant Spectrum Method.

Electrode Effects on General Modes in High-Overtone Bulk Acoustic Resonators

Electrode Effects on Frequency Spectra and Electromechanical Coupling Factors of HBAR

Study on Distribution of Resonance Frequency of High-Overtone Bulk Acoustic Resonators

Effects of Electrodes on Performance Figures of Thin Film Bulk Acoustic Resonators.

Impedance-matched High-overtone Bulk Acoustic Resonator

Elastic Effects of Electrode on Thin Film Bulk Acoustic Resonator (Fbar)

Theoretical Simulation and Optimization on Material Parameters of Thin Film Bulk Acoustic Resonator

Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator

Electrically Tunable Film Bulk Acoustic Resonator Based On Au/Zno/Al Structure

Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate

Electromagnetic analysis of thin film bulk acoustic resonator

HBAR sensor based on ALN thin films acoustic bulk wave resonator

Extracting Intrinsic Parameters of Film Bulk Acoustic Resonators with Different Sizes of Pads

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Study on the Spurious Modes in FBAR Resonators with Quasi-Free Edges

Nonlinear analysis of flexoelectric acoustic energy harvesters with Helmholtz resonator

Preparation and Performance Study on Mg-doped ZnO Solid Mounted Film Bulk Acoustic Resonator

Fully Impedance-Matched High-Overtone Bulk Acoustic Wave Resonators Using 2DEG Electrodes

Use of Heavy Dielectric Materials in Solidly Mounted A1 Mode Resonators Based on Lithium Niobate

Broadband Magnetoelectric Antenna Driven by Multiple High-overtone Bulk Acoustic Wave Modes