Abstract:This paper presents a high quality-factor (Q-factor) quartz tuning fork (QTF) with a glass probe attached, used in frequency modulation tapping mode atomic force microscopy (AFM) for the surface profile metrology of micro and nanostructures. Unlike conventionally used QTFs, which have tungsten or platinum probes for tapping mode AFM, and suffer from a low Q-factor influenced by the relatively large mass of the probe, the glass probe, which has a lower density, increases the Q-factor of the QTF probe unit allowing it to obtain better measurement sensitivity. In addition, the process of attaching the probe to the QTF with epoxy resin, which is necessary for tapping mode AFM, is also optimized to further improve the Q-factor of the QTF glass probe. The Q-factor of the optimized QTF glass probe unit is demonstrated to be very close to that of a bare QTF without a probe attached. To verify the effectiveness and tire advantages of the optimized QTF glass probe unit, the probe unit is integrated into a home-built tapping mode AFM for conducting surface profile measurements of micro and nanostructures. A blazed grating with fine tool marks of 100nm, a microprism sheet with a vertical amplitude of 25 mu m and a Fresnel lens with a steep slope of 90 degrees are used as measurement specimens. From the measurement results, it is demonstrated that the optimized QTF glass probe unit can achieve higher sensitivity as well as better stability than conventional probes in the measurement of micro and nanostructures.

Investigation of Q Factor of the QCM Resonator under Overtone Modes.

Exploration of the Mass Sensitivity of Quartz Crystal Microbalanceunder Overtone Modes Using Electrodeposition Method

Study on Quality Factor of the Ring Electrode QCM Resonator

Exploring the Dissipation Parameter of Quartz Crystal Resonator under 3-Overtone Mode

Analysis of Quality Factor of the Quartz Crystal Resonator with N-M Asymmetric Electrodes

High Quality-Factor Quartz Tuning Fork Glass Probe Used In Tapping Mode Atomic Force Microscopy For Surface Profile Measurement

Overtone Mass Sensitivity of Quartz Crystal Microbalance Sensor with Asymmetric N-M Type Electrode Configuration.

Quartz crystal microbalance based on torsional piezoelectric resonators.

Convergence of Dissipation and Impedance Analysis of Quartz Crystal Microbalance Studies

Method for QCM Resonator Device Equivalent Circuit Parameter Extraction and Electrode Quality Assessment

Overtone frequency spectra for x3-dependent modes in AT-cut quartz resonators.

The investigation of point defect modes of phononic crystal for high Q resonance

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Modulation of High Quality Factors in Rolled-Up Microcavities

Study of Force-Frequency Characteristics in AT-Cut Strip Quartz Crystal Resonators with Different Rotation Angles

Sensing Performance Analysis on Quartz Tuning Fork-Probe at the High Order Vibration Mode for Multi-Frequency Scanning Probe Microscopy.

Greater Than One Billion Q Factor for On-Chip Microresonators

Rigorous Q Factor Formulation and Characterization for Nonlinear Oscillators

Study For The Quartz Resonator Force Sensor With Energy Trapping Theory

Equivalent Electromechanical Model for Quartz Tuning Fork Used in Atomic Force Microscopy

Thickness shear mode quartz crystal resonators with optimized elliptical electrodes