Abstract:Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy and quantum control of mechanical oscillators via opto- and electromechanics. The mechanical quality factor ($Q$) of these systems determines the thermomechanical force noise and the thermal decoherence rate of mechanical quantum states. While the dissipation rate is typically set by the bulk acoustic properties of the material, by exploiting dissipation dilution, mechanical $Q$ can be engineered through geometry and increased by many orders of magnitude. Recently, soft clamping in combination with strain engineering has enabled room temperature quality factors approaching one billion ($10^9$) in millimeter-scale resonators. Here we demonstrate a new approach to soft clamping which exploits vibrations in the perimeter of polygon-shaped resonators tethered at their vertices. In contrast to previous approaches, which rely on cascaded elements to achieve soft clamping, perimeter modes are soft clamped due to symmetry and the boundary conditions at the polygon vertices. Perimeter modes reach $Q$ of 3.6 billion at room temperature while spanning only two acoustic wavelengths -- a 4-fold improvement over the state-of-the-art mechanical $Q$ with 10-fold smaller devices. The small size of our devices makes them well-suited for near-field integration with microcavities for quantum optomechanical experiments. Moreover, their compactness allows the realization of phononic lattices. We demonstrate a one-dimensional Su-Schrieffer-Heeger chain of high-$Q$ perimeter modes coupled via nearest-neighbour interaction and characterize the localized edge modes.

Modulation of High Quality Factors in Rolled-Up Microcavities

Localized High-Q Modes in Conical Microcavities

Modes Trimming and Clustering in a Weakly Perturbed High‐Q Whispering Gallery Microresonator

Exceptional Points in Rolled-Up Tubular Microcavities

Dynamical Tunneling-Assisted Coupling of High-Q Deformed Microcavities Using A Free-Space Beam

Chaos-assisted Free-Space Coupling and Transmission Spectra of High-Q Deformed Microcavities

Characterization of Microresonator-Geometry-deformation for Cavity Optomechanics.

Pushing the Limit of High-Q Mode of a Single Subwavelength Dielectric Nanocavity

Pushing the Limit of High-Q Mode of a Single Dielectric Nanocavity

Mode Frequency Shifts and Q-Factor Changes in 2d Microflower Cavity and Its Deformed Cavity

The Combination Of High Q Factor And Chirality In Twin Cavities And Microcavity Chain

Ultra-high Quality Factor Metallic Micro-Cavity Based on Concentric Double Metal-Insulator-metal Rings

Mechanism of unidirectional emission of ultrahigh Q Whispering Gallery mode in microcavities

The Investigation of Variation of Transmissiontduring the Improvement Ofqof the 2D Photonic Crystal Microcavities by Local Field Modulation

Nanomechanical resonators with ultra-high-$Q$ perimeter modes

Electromagnetic Wave Propagation in a Rolled-Up Tubular Microcavity

Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators Toward a Unified Quality Factor Model.

Rolled‐Up Whispering‐Gallery Mode Optical Microcavities

Analysis of Eigenmodes for Asymmetric Resonant Micro-Cavities

Geometry Dependent Evolution of the Resonant Mode in ZnO Elongated Hexagonal Microcavity