Nonlinear Coupling of Flexural Mode and Extensional Bulk Mode in Micromechanical Resonators

Tianyi Zhang,Juan Ren,Xueyong Wei,Zhuangde Jiang,Ronghua Huan
DOI: https://doi.org/10.1063/1.4970556
IF: 4
2016-01-01
Applied Physics Letters
Abstract:The effect of coupling between the extensional bulk mode and the flexural mode of a cantilever beam resonator has been experimentally studied by exciting the two modes simultaneously. The modal frequency shift of linear extensional bulk mode shows a quadratic relationship with the square of flexural mode's amplitude displacement, and a frequency shift up to 1492 Hz is observed when the flexural mode is driven by a AC signal Vac of 3 V and a DC bias of 30 V. The flexural mode shows a Duffing-like behavior with a softening nonlinearity and its frequency shift is influenced not only by its own nonlinear amplitude-frequency effect but also the extensional mode's amplitude as predicted. The nonlinear coupling coefficient is found to be about two orders of magnitude larger than the softening nonlinearity.
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