Nonlinear modal coupling in a high-stress doubly-clamped nanomechanical resonator

K. J. Lulla,R. B. Cousins,A. Venkatesan,M. J. Patton,A. D. Armour,C. J. Mellor,J. R. Owers-Bradley
DOI: https://doi.org/10.1088/1367-2630/14/11/113040
2012-04-20
Abstract:We present results from a study of the nonlinear intermodal coupling between different flexural vibrational modes of a single high-stress, doubly-clamped silicon nitride nanomechanical beam. The measurements were carried out at 100 mK and the beam was actuated using the magnetomotive technique. We observed the nonlinear behavior of the modes individually and also measured the coupling between them by driving the beam at multiple frequencies. We demonstrate that the different modes of the resonator are coupled to each other by the displacement induced tension in the beam, which also leads to the well known Duffing nonlinearity in doubly-clamped beams.
Mesoscale and Nanoscale Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to study the nonlinear modal coupling between different flexural vibration modes in a high - stress, double - clamped silicon nitride nano - mechanical resonator. Specifically, through experimental and theoretical analysis, the authors explored how to drive the resonator using magnetomotive techniques under extremely low - temperature (100 mK) conditions and observed the stretching nonlinear effect caused by the displacement of the beam, resulting in Duffing - type nonlinear behavior and coupling between different modes. ### Main Problems and Objectives 1. **Research on Nonlinear Behavior**: - Study the nonlinear behavior of a single high - stress, double - clamped silicon nitride nano - mechanical beam in different flexural vibration modes. - Explore the impact of these nonlinear behaviors on device performance, especially the limitations in sensor applications and their potential application value. 2. **Measurement of Modal Coupling**: - Measure the coupling effect between different vibration modes, especially by observing this coupling through the multi - frequency driving method. - Analyze the mechanism of modal coupling, especially how the tension change caused by displacement leads to the interaction between different modes. 3. **Verification of Theoretical Model**: - Use a simple theoretical model to explain the experimental results, especially the Duffing equation established based on the stretching nonlinearity of the beam. - Verify the theoretical prediction through experimental data to ensure the accuracy and reliability of the model. ### Combination of Experiment and Theory - **Experimental Part**: - Conduct experiments in a low - temperature environment of 100 mK to reduce the influence of thermal noise. - Use magnetomotive techniques to drive the resonator and measure the voltage response through a network analyzer to obtain the frequency response curves of different modes. - **Theoretical Part**: - Establish an Euler - Bernoulli beam equation considering geometric nonlinearity and derive the equation of motion in the form of the Duffing equation. - Verify the validity of the theoretical model by comparing numerical calculations with experimental data. ### Conclusion Through systematic research and analysis, the authors confirm that flexural nonlinearity provides a good quantitative description of modal coupling. The experimental results show that when the displacement of the beam reaches a small fraction of its width, the system already exhibits significant nonlinear behavior. In addition, the study also shows that the physical displacement of one mode can be calculated by measuring the frequency shift of another mode, which is of great significance for understanding the dynamic behavior of nano - mechanical systems. ### Formula Summary - **Equation of Motion**: \[ \rho A \ddot{y} + \eta \dot{y} + EI y'''' - \left[ T_0 + \frac{EA}{2L} \int_0^L (y')^2 dx \right] y'' = F_L \] - **Duffing Equation**: \[ \frac{d^2 u_n}{dt^2} + \omega_{n,0} Q_n \frac{du_n}{dt} + \omega_{n,0}^2 u_n + \lambda I_{nn}^2 u_n^3 = f_n \cos(\omega_n t) \] - **Frequency Shift**: \[ \omega_{n,1} = \omega_{n,0} \sqrt{1 + \frac{3}{4} \lambda I_{nn} r_n^2} \] \[ \omega_{n,2} = \omega_{n,0} \sqrt{1 + \frac{3}{4} \lambda I_{nn} r_n^2 + \lambda \left( \frac{1}{2} I_{nn} I_{mm} + I_{nm}^2 \right) r_m^2} \] These formulas help to explain the nonlinear behavior and modal coupling phenomena observed in the experiment.