Mechanical Control of Nonlinearity in Doubly Clamped MEMS Beam Resonators Using Preloaded Lattice-Mismatch Strain

Chao Li,Boqi Qiu,Yuri Yoshioka,Kazuhiko Hirakawa,Ya Zhang
DOI: https://doi.org/10.1103/physrevapplied.19.024025
IF: 4.6
2023-02-10
Physical Review Applied
Abstract:We theoretically clarify the mechanism of the strain-tuning effect for control of the mechanical nonlinearity in doubly clamped MEMS beam resonators and experimentally demonstrate that nonlinearity can be effectively suppressed with a preloaded lattice-mismatch strain in the MEMS beam. Mechanical nonlinearity arises from the hardening- and softening-nonlinearity terms in the Duffing motion equation of the MEMS beam. By approaching the buckling condition of the MEMS beam, the substantially increased softening nonlinearity greatly compensates for the hardening nonlinearity, resulting in suppression of the total nonlinearity. Utilizing this knowledge, we fabricate InxGa1−xAs MEMS beams with a preloaded lattice-mismatch strain, which is achieved by adding a small amount ( x = ∼0.4%) of indium to the GaAs MEMS beam during wafer growth. The buckling condition in the experiment is achieved by carefully modulating the length of the InxGa1−xAs MEMS beams. As a result, mechanical nonlinearity is largely modulated from hardening to softening and reaches a quasizero value near the buckling condition, demonstrating the effectiveness of using lattice mismatch for controlling the mechanical nonlinearity of MEMS resonators. https://doi.org/10.1103/PhysRevApplied.19.024025 © 2023 American Physical Society
physics, applied
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