Mode-Dependent Scaling of Nonlinearity and Linear Dynamic Range in a NEMS Resonator

M. Ma,N. Welles,O. Svitelskiy,C. Yanik,I. I. Kaya,M. S. Hanay,M. R. Paul,K. L. Ekinci

DOI: https://doi.org/10.1063/5.0215566

2024-08-24

Abstract:Even a relatively weak drive force is enough to push a typical nanomechanical resonator into the nonlinear regime. Consequently, nonlinearities are widespread in nanomechanics and determine the critical characteristics of nanoelectromechanical systems (NEMS) resonators. A thorough understanding of the nonlinear dynamics of higher eigenmodes of NEMS resonators would be beneficial for progress, given their use in applications and fundamental studies. Here, we characterize the nonlinearity and the linear dynamic range (LDR) of each eigenmode of two nanomechanical beam resonators with different intrinsic tension values up to eigenmode $n=11$. We find that the modal Duffing constant increases as $n^4$, while the critical amplitude for the onset of nonlinearity decreases as $1/n$. The LDR, determined from the ratio of the critical amplitude to the thermal noise amplitude, increases weakly with $n$. Our findings are consistent with our theory treating the beam as a string, with the nonlinearity emerging from stretching at high amplitudes. These scaling laws, observed in experiments and validated theoretically, can be leveraged for pushing the limits of NEMS-based sensing even further.

Applied Physics

What problem does this paper attempt to address?

The problem that this paper attempts to address is understanding the variation patterns of nonlinear and linear dynamic range (LDR) in nanoelectromechanical systems (NEMS) resonators with different intrinsic mode numbers. Specifically, the researchers focus on the following points:

1. **Nonlinear Characteristics**: Investigate how the Duffing constant varies under different intrinsic modes. The Duffing constant is an important parameter describing nonlinear behavior.
2. **Linear Dynamic Range (LDR)**: Determine the linear dynamic range for each intrinsic mode, which is the ratio of the maximum signal amplitude that the system can detect without entering the nonlinear region to the thermal noise amplitude.
3. **Relationship of Key Parameters**: Explore the relationship between the Duffing constant, critical amplitude, and linear dynamic range, and verify whether these relationships conform to theoretical predictions.

Through these studies, the authors aim to provide a theoretical foundation and technical guidance for optimizing the performance of NEMS resonators in sensing applications. This will help improve the sensitivity and reliability of NEMS sensors, especially in applications involving higher-order modes.