Abstract:Surface acoustic waves (SAWs) are of practical importance across several fields. Particularly, a wide range of SAW devices is available, which are based on the stacking piezoelectric layered hetero-structures. As such, efficient and stable algorithm of analyzing electromechanical coupling factor (K2) should be of specific interest, inspiring a variety of piezoelectric layered structures. Motivated by the above considerations, this paper exploits the performance of Sc43% AlN57%/ZnO/diamond piezoelectric hetero-structures using matrix and polynomial methods. Consequently, dispersion curves, the electromechanical coupling factor and profiles of Rayleigh waves are calculated, in which the properties of hexagonal intermediate ZnO layer are varied. Here, $$ (0001) - [10\bar{1}0]{\text{ZnO}} $$ or $$ (11\bar{2}0) - [0001]{\text{ZnO}} $$ directions of the middle layer were integrated with Sc43% AlN57%/diamond to be a composite hetero-structure with a larger K2 of SAW. Accordingly, a commercial ZnO specimen was characterized by scanning electron microscopy (SEM) as well as Raman and XRD spectroscopy to determine its available crystallographic directions and the C-axis hexagonal character. Comparing with conventional AlN/diamond hetero-structures, the inclusion of ZnO as the intermediate layer provides with an excellent electromechanical coupling factor which significantly improves the $$ (11\bar{2}0) - [0001] $$ structure. However, comparing with the ZnO/diamond hetero-structure, a high phase velocity (Vph) was observed. Therefore, the development of a well-balanced structure that maximizes the values of Vph and K2 is systematically challenging. Moreover, it was found that initial stresses have a significant effect on the Rayleigh wave velocities. Fundamental A0 Lamb mode can be generated in piezoelectric hetero-structures when the properties of substrate remain very low relative to the film. Numerical results obtained in this paper can provide a deeper insight into the nature of the Rayleigh wave behaviors in piezoelectric hetero-structures, involving a ZnO intermediate layer.

Electrode Effects on Frequency Spectra and Electromechanical Coupling Factors of HBAR

Electrode Effects on General Modes in High-Overtone Bulk Acoustic Resonators

Parameter Characterization of High-Overtone Bulk Acoustic Resonators by Resonant Spectrum Method.

Effects of Electrodes on Performance Figures of Thin Film Bulk Acoustic Resonators.

Study on Distribution of Resonance Frequency of High-Overtone Bulk Acoustic Resonators

Effects of electrodes on performances of multilayered film acoustic resonance biosensors

Electromagnetic analysis of thin film bulk acoustic resonator

FEM model and simulation effect of electrode shape on transverse coupling wave in FBAR sensor

Effects of Initial Stresses on the Electromechanical Coupling Coefficient of SH Wave Propagation in Multilayered PZT-5H Structures

Resonance Effects of Bilayered Piezoelectric Films Used for Bulk Acoustic Wave Sensors

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Effect of Electrodes on Force–Frequency Characteristics of Rotated Y-Cut Quartz Resonators

Influence of a Piezoelectric ZnO Intermediate Layer on Rayleigh Waves Propagating in Sc 43% AlN 57% /zno/diamond Hetero-Structures Subjected to Uniaxial Stress

Effects Of Deposition Conditions On The Structural And Acoustic Characteristics Of (11(2)Over-Bar0) Zno Thin Films On R-Sapphire Substrates

Lateral Size-Dependence in UHF Mode-Coupled ZnO FBARs to Suppress Undesirable Eigen-Modes and Weaken Mounting Effect

Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator

Frequency Interferences of Two-Unit Quartz Resonator Arrays Excited by Lateral Electric Fields

Effects of Thickness Deviation of Elastic Plates in Multi-Layered Resonance Systems on Frequency Spectra

Numerical modeling of the magnetoelectric effect in magnetostrictive piezoelectric bilayers

Effects of Electrode off Centre on Trapped Thickness-Shear Modes in Contoured AT-Cut Quartz Resonators

Acoustoelectric Effect due to an In-Depth Inhomogeneous Conductivity Change in ZnO/Fused Silica Substrates