FEM model and simulation effect of electrode shape on transverse coupling wave in FBAR sensor

Li Kan,Dong Shu-Rong,Wang De-Miao
2006-01-01
Abstract:FBAR has a simple semiconductor process and good high-frequency properties. FBAR is an excellent candidate of high sensitive integrated senor. Derived from second piezoelectric function theories, the transverse coupling wave equation of acoustic wave and electromagnetic wave and impedance are analyzed as FEM model in this paper. The effect of the electrode shape on transverse coupling wave is simulated based on above equation by ANSYS. The electrode shapes include square, round, triangle and pentagon. The simulation results are very close to measurement results and it is shown that this is an exacted simulation method. FBAR with pentagonal electrode has lowest interference by transverse coupling wave.
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