Wireless Tiny Mass Sensor System Based On Fbar

W. W. Cheng,Y. Han,S. R. Dong,X. X. Han,S. H. Zhao,H. J. Zhang
2009-01-01
Abstract:A new-type wireless tiny mass sensor circuit based on film bulk acoustic resonators (FBARs) with dual-path and a receiver to test the sensor circuit are designed, fabricated and tested. A pair of differential inputs of the sensor circuit, one is for sensing and the other is for reference, sense the increase of mass loading respectively and simultaneously in the same environment. Therefore, the sensor circuit can measure tiny mass on the FBAR, accurately without effect of temperature. Further, the measuring results are sent to a receiver wirelessly to display a visual value to remote users.
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