Abstract:Film bulk acoustic resonator ( FBAR ) based on MEMS fabrication process is a new type of mass sensor with high quality factor Q, and thus it has very high mass sensitivity in the gaseous phase en-vironment.However, when it works in liquid, the value of Q decreases drastically because of acoustic energy damping in the liquid .In this paper , we presented a solution of integrating microchannel and FBAR sensor to reduce the contact area with liquid, effectively improving theQ value.A new fabrication procedure was designed , which realized the integration of microchannel and resonator by using MEMS fabrication process .This device was adopted as a sensor which enjoys relatively low detection limitation and good linearity when detecting different concentrations of glucose .This method takes full advantage of the high yield of MEMS process , greatly reducing the cost of devices .The sensor can realize the measure-ment of samples in microliter level because of integration with microchannel ,which has a significant ap-plication prospect in the measurement of micro samples .

A Film Bulk Acoustic Liquid Concentration Sensor Integrated with Microchannel