Abstract:This paper presents a polyimide-based film bulk acoustic resonator (PI-FBAR) humidity sensor operating in resonant frequency and reflection coefficient S-11 dual-mode. Models and experiments showed that those two modes are governed by different mechanisms, of which the former is based on the modulation of the humidity on the Young's modulus of PI, while the latter is based on the modulation of the humidity on dynamic resistance. In the full-scale relative humidity (RH) testing range (20%-80%), the resonant mode achieved a sensitivity of 29.93 kHz/%RH (28.56 ppm/%RH) with ultra-high linearity (R-2 = 0.9993), and the humidity hysteresis error is only about 1.32% RH. For the S-11 response, an ultra-high average humidity sensitivity of 0.044dB/%RH (2095ppm/%RH) was achieved, and the sensitivity at 20% low relative humidity reached 0.075dB/%RH (3571ppm/%RH), which is more than 2 orders of magnitude higher than that of the resonant frequency response. And the limit of detection (LOD) for the humidity response of S-11 is 0.035% RH, which is half lower than that of the resonant mode. Thus, we can choose a more appropriate sensing mode according to particular application or combine these two mechanisms in one test to expand the sensor competences by taking advantages of each method. In addition, as both of the two modes have high sensitivity to humidity and temperature, we deduced a method to calibrate the temperature for the humidity sensing. Based on this dual-mode mechanism, we can further achieve either temperature-calibrated humidity sensing or dual-variable sensing of humidity and temperature with more accurate sensing results.

Dual-mode Thin Film Bulk Acoustic Wave Resonators for Parallel Sensing of Temperature and Mass Loading

A Mass Sensor with High Sensitivity Based on Thin Film Bulk Acoustic Resonators

Processing chip for thin film bulk acoustic resonator mass sensor

Film Bulk Acoustic Resonator Pressure Sensor with Self Temperature Reference

Wireless Tiny Mass Sensor System Based On Fbar

Film Bulk Acoustic Resonator Nanosensors for Multi-Task Sensing

A Single Fbar-Based Temperature and Pressure Sensors

Experimental Comparison of FBARs and SMRs Responsitivities to Mass Loadings

Temperature calibrated on-chip dual-mode film bulk acoustic resonator pressure sensor with a sealed back-trench cavity

Bulk Acoustic Wave Resonator Based Wireless and Passive Pressure Sensor

Direct Comparison of the Gravimetric Responsivities of ZnO-based FBARs and SMRs

Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator

Flexible magnetic sensor based on FBAR

Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator

Dual-mode thin film bulk acoustic wave resonator and filter

A High-Sensitivity Gravimetric Biosensor Based on S1 Mode Lamb Wave Resonator

A Film Bulk Acoustic Liquid Concentration Sensor Integrated with Microchannel

Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators As Humidity Sensors

Film Bulk Acoustic Resonators (fbars) As Biosensors: A Review

PI-Based Dual-Mode FBAR Humidity Sensor Toward Ultra-High Sensitivity and Self-Temperature-Compensation Capability

Film Bulk Acoustic Resonators Integrated on Arbitrary Substrates Using a Polymer Support Layer.