Abstract:Thin film bulk acoustic resonator (FBAR) plays a very important role in radio frequency (RF) filters used in cell phone and other wireless systems. Although FBAR is commercialized, the design/process interactions on the frequency response variation in FBAR device are still lacking. Design and fabrication are two crucial aspects affecting FBAR device performance. In this report, various solidly mounted resonators (SMR) were designed, fabricated and analyzed to study wafer-level site-to-site RF variation on design and fabrication process. As a key process step for SMR FBAR, the optimization process of Mg-doped ZnO piezoelectric thin film deposition was studied by varying thin film sputtering conditions using various sputtering targets and by post annealing treatment after the deposition. The quality of this crucial layer was verified by XRD on its (0 0 2) crystallization and wafer-level FBAR RF characterization. FBAR devices with high quality were fabricated with an excellent resonant behavior near 2 GHz and a maximum return loss of -15 to 25 dB. Quality factor Q ranges from 400 to 800, with a coupling coefficient keff(2) of 1.5-3%. Wafer-level and wafer-to-wafer variation of central frequency are within 1.8-2.1 GHz. Computer simulation verified that this frequency variation correlates to the piezoelectric film variation of 1.6-1.9 mu m. Process control on this piezoelectric thin film is essential to maintaining the resonator frequency-controlled value when building duplexer RF circuits. The dependency of RF performance on FBAR size, density and orientation is not obvious, compared to that of the wafer-level FBAR device variation on fabrication process. Regarding to the Mg-doping effect in MgxZn1-xO piezoelectric film, the amount of Mg in MgxZn1-xO film during the sputtering process must be properly controlled within 30% to keep the piezoelectric quality. The average acoustic speed of the Mg-doped ZnO film is 6870 m/s with the estimated range of 5760-7980 m/s, which is better than that of pure ZnO film (6330 m/s).

Optimization of Mason Model in Thin Film Bulk Acoustic Resonators with Extra Passivating Piezoelectric Structures

Electromagnetic analysis of thin film bulk acoustic resonator

Modeling of RF Filter Component Based on Film Bulk Acoustic Resonator

Modeling and Simulating of Complex Double Piezoelectric Layers’ FBAR

A Design Approach for High-Q FBARs with Double Frames

FBAR Modeling and Design of FBAR RF Filters for MIMO

The Analysis of Film Acoustic Wave Resonators with the Consideration of Film Piezoelectric Properties

Numerical Investigation of Phononic Crystal Based Film Bulk Acoustic Wave Resonators

Design and modelling of thin film bulk acoustic resonator (FBAR) for RF application

Design and Optimization of FBAR Filter Using Acoustic-Electromagnetic Coupling Model and MBVD Model

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Film Bulk Acoustic Resonators Integrated on Arbitrary Substrates Using a Polymer Support Layer.

Modeling of FGM-TFBARS with the method of reverberation-ray matrix

Progress of Research on the Thin-film Bulk Acoustic Resonator

Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator

Finite element analysis of lateral field excited thickness shear mode film bulk acoustic resonator

Process Optimization and Device Variation of Mg-doped ZnO FBARs

Flexible structured high-frequency film bulk acoustic resonator for flexible wireless electronics

Electrically Tunable Film Bulk Acoustic Resonator Based On Au/Zno/Al Structure

Simulation of Film Bulk Acoustic Resonator Based on Two-Dimensional Phononic Crystals

The Free Vibrations of Layered Thin Film Plates and Applications in Resonator Analysis