The Free Vibrations of Layered Thin Film Plates and Applications in Resonator Analysis

Ji Wang,Jiansong Liu,Jianke Du,Dejin Huang,Weiqiu Chen

DOI: https://doi.org/10.1117/12.842923

2009-01-01

Abstract:Thin film acoustic wave resonators are typical layered structures consisting of piezoelectric and metal films serving as essential elements of resonance and excitation. Such a layered structure can be analyzed for the proper selection of the thicknesses of thin films based on the vibration frequency and resonator property. In recent studies on thin film acoustic wave resonators, especially the film bulk acoustic wave resonators (FBAR) and solidly mounted resonators (SMR) types, extensive fabrication and characterization efforts have been contributing to the development of many novel products and processing technology. The recently renewed global interests on the FBAR technology also expect the design of resonators can be done through sophisticated analysis with wave propagation and circuit theories. These requirements have motivated our studies on the vibrations of layered piezoelectric structures for applications in the FBAR resonator analysis and design. Based on the justified assumption that the microstructure of FBAR can also be treated as infinite plates, the vibration frequencies of the thickness-extension and thickness-shear types are calculated from layered models with perfectly bonded interfaces. The calculated frequencies are in good agreement with experimental data. We now extend the analysis to SMR structures, which have much more bonded layers of piezoelectric and metal films under the same assumption of infinite plates and perfect interfaces. The vibration solutions are given in terms of frequency and displacements. These results can be used for the proper determination of the film thicknesses and selection of materials based on the resonator frequency which can be calculated from mechanical vibrations.