Modeling and Simulation of Thin-Film Bulk Acoustic Resonators

HJ Zhao,TL Ren,JS Liu,LT Liu,ZJ Li
DOI: https://doi.org/10.1109/freq.2002.1075853
2002-01-01
Integrated Ferroelectrics
Abstract:This paper describes the modeling and simulation results for thin film BAW resonators. We present the frequency tuning mechanisms, the influence of the thickness of the electrodes and Q of the resonator. The BAW resonator was fabricated with the piezoelectric thin film and Bragg reflector.
What problem does this paper attempt to address?