Impedance-matched High-overtone Bulk Acoustic Resonator

Megumi Kurosu,Daiki Hatanaka,Ryuichi Ohta,Hiroshi Yamaguchi,Yoshitaka Taniyasu,Hajime Okamoto

DOI: https://doi.org/10.1063/5.0141405

2023-04-06

Abstract:A high-overtone bulk acoustic resonator (HBAR), in which a piezoelectric transducer is set on an acoustic cavity, has been attracting attention in both fundamental research and RF applications due to its scalability, high frequency, and high quality factor. The acoustic impedance matching in HBARs is crucial for efficient acoustic power transfer from the piezoelectric transducer to the cavity. However, impedance mismatch remains in most HBARs due to the metal layer insertion between the piezoelectric layer and cavity substrate. In this study, we fabricated a nearly impedance-matched high-quality HBAR using an epitaxial AlN piezoelectric layer directly grown on a conductive SiC cavity substrate with no metal layer insertion. The small impedance mismatch was verified from the variation in the free spectral range (FSR), which is comparable to the best value in previously reported HBARs. The experimentally obtained FSR spectra was greatly reproduced by using the Mason model. Broadband phonon cavity modes up to the K-band (26.5 GHz) were achieved by reducing the thickness of the AlN layer from 800 to 200 nm. The high figure of merit of $f\times\text{Q} \sim 1.3\times 10^{13}\ \textrm{Hz}$ at 10 GHz was also obtained. Our nearly impedance-matched high-quality HBAR will enable the development of RF applications, such as low-phase noise oscillators and acoustic filters, as well as research on high-frequency acoustic systems hybridized with electric, optical, and magnetic systems.

Mesoscale and Nanoscale Physics,Applied Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is the acoustic impedance mismatch problem existing in traditional high - order bulk acoustic wave resonators (HBARs). This leads to large variations in the frequency mode spacing (free spectral range, FSR), thereby affecting their performance and efficiency in high - frequency applications. Specifically:

1. **Acoustic impedance mismatch problem**: In the traditional HBAR structure, the metal bottom - layer electrode inserted between the piezoelectric layer and the acoustic cavity hinders the smooth acoustic impedance transition, resulting in low acoustic power transmission efficiency. And due to the acoustic impedance mismatch, the FSR varies greatly, which is not conducive to applications such as information storage and broadband material spectral analysis.

2. **High - frequency operation limitations**: Traditional HBARs are difficult to achieve efficient and stable high - frequency (such as K - band, 26.5 GHz) operations, limiting their application potential in 5G and future 6G communication systems, such as low - phase - noise oscillators and acoustic filters.

To solve these problems, the author proposes a new type of high - order bulk acoustic wave resonator (HBAR) with almost acoustic impedance matching, achieving improvements through the following methods:

- **Direct - grown AlN piezoelectric layer**: An 800 - nm - thick AlN piezoelectric layer is epitaxially grown directly on the conductive 6H - SiC substrate without inserting a metal bottom - layer electrode.
- **n - type SiC substrate as a floating bottom - layer electrode and acoustic cavity**: The conductive n - type SiC substrate is used to simultaneously serve as a floating bottom - layer electrode and a low - loss acoustic cavity to ensure good acoustic impedance matching.
- **Verify acoustic impedance matching**: The acoustic impedance matching situation is experimentally verified by measuring FSR variations, and numerical calculations are carried out using a one - dimensional Mason model. The results show that the experimentally measured FSR spectra are consistent with the model predictions.

These improvements make the HBAR have smaller FSR variations, a higher operating frequency (up to 26.5 GHz), and a higher quality factor (Q - factor), thereby improving its performance and reliability in high - frequency applications. In addition, this research also shows the potential application value of this HBAR in the future mixed research of high - frequency acoustic systems with electrical, optical, and magnetic systems.