Fabrication and Flying Test of Silicon Sliders

Jing Lin,Yonggang Meng,Nanhai Song
DOI: https://doi.org/10.1007/978-3-642-03653-8_186
2009-01-01
Abstract:With the further increase of the magnetic storage density of hard disk, flying height of sliders has to decrease down to 5nm in the near future. To ensure that the working flying height is coincident with the design goal, it is crucial to measure the flying height of a slider design during the development of new sliders. The manufacturing of real sliders requires specific materials, processes and equipment. For the purpose of flying height test, however, real sliders are not necessary, some substitutions can meet the experiment demands as long as the shape and size of the substitutions are same as those of real ones. In this article, fabrication of sliders with silicon wafer, which is the most common substrate used in microsystems, is introduced. The problems in mask design, slider fabrication and dicing are discussed. Some principal air bearing surface parameters of the self-made silicon sliders are measured. The flying characteristics of the silicon sliders is tested on a stand-alone tester with the laser heterodyne interferometry method. The test results coincide well with the simulation results. The research results indicate that the self made silicon sliders can be used as the substitutions of real sliders for flying height testing, providing a simple approach which can greatly save the costs and time for preparation of slider samples.
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