Design and fabrication of an integrated optical flying head for near-field recording system

Yanyang Zi,Zhengjia He,Dapeng Zhao,Qingxiang Li
DOI: https://doi.org/10.1117/12.574720
2005-01-01
Abstract:To achieve 50nm flying height and accuracy tracking motion, it is essential to reduce the whole size of optical flying head (OFH) to improve mechanical and optical performance. With a view to the practical applicability, a novel integrated OFH based on the combination of SIL and objective lens (OL) is proposed, which possesses both high optical performance and reasonable tolerance in assembly. In addition, the fabrication process of this OFH is illustrated in detail. Finally, the main parameters of ABS for OFH slider are presented by means of numerical simulation. The simulation result demonstrates that the flying height of the integrated OFH slider can keep stable from 43nm to 44nm at different radium of optical disk, which can yield high signal/noise ratio optical signal during the read/write motion in near field recording (NFR) system.
What problem does this paper attempt to address?