Research on the Design and Fabrication of Air Bearing Sliders in Hard Disk Drives

谭晓兰,孟永钢,林晶,李宁
DOI: https://doi.org/10.13841/j.cnki.jxsj.2010.04.019
2010-01-01
Abstract:The methods of design and fabrication of head sliders are discussed in this paper. The structures and design methods of head sliders are analysed,and the micro-fabrication of a head slider has been completed in term of the methods and equipment of lithography and dry etching. 3D surface microstructures of the head slider fabricated with the dry etching are measured on a Vecco MHT-III interferometer,and the analysis results are shown.
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