Experimental Research on Dry Etching and Wet Etching of Head Sliders in Hard Disk Drives

TAN Xiao-lan,MENG Yong-gang,LI Ning,LIN Jing
2007-01-01
Abstract:Process methods of micro-fabrication of head sliders for hard disk drives were presented.Taking a typical structure of slider as an example,the design and fabrication of the masks for lithography were given.With the principles and processes of photolithography,dry etching and wet etching,the fabrication of the head slider were experimented.The etching parameters and the photos of the head slider were presented.3D surface microstructures of the head sliders were analyzed by Vecco MHT-III interferometer.The results indicate that the process and parameters are reasonable and universal.
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