Novel Preparation Scheme of Monolithic Pyroelectric Thin Film Infrared Sensor.

Wei Zhang,Xi Yao,Xiaoqing Wu
DOI: https://doi.org/10.1142/s1465876303001927
2003-01-01
International Journal of Computational Engineering Science
Abstract:International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 631-636 (2003) Poster PapersNo AccessNOVEL PREPARATION SCHEME OF MONOLITHIC PYROELECTRIC THIN FILM INFRARED SENSORWEI ZHANG, XI YAO, and XIAOQING WUWEI ZHANGElectronics Materials Research Laboratory (EMRL), Xi'an Jiatong University, Xi'an 710049, China Search for more papers by this author , XI YAOElectronics Materials Research Laboratory (EMRL), Xi'an Jiatong University, Xi'an 710049, China Search for more papers by this author , and XIAOQING WUElectronics Materials Research Laboratory (EMRL), Xi'an Jiatong University, Xi'an 710049, China Search for more papers by this author https://doi.org/10.1142/S1465876303001927Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThis paper presents a new preparation scheme of monolithic pyroelectric thin film infrared sensor. The sensor can be prepared directly on readout circuit and its electrode can be connected to the readout circuit through a via. PbTiO3 thin film is used as pyroelectric material. Porous SiO2 thin film is applied onto silicon wafer to improve the thermal isolation of the pyroelectric layer. Copper interconnection is used in readout circuit to solve the problem that aluminium interconnection can't endure the annealing temperature of PbTiO3 thin film.Keywords:monolithicpyroelectricinfraredCopper interconnection References Reza Navid, Copper/low-k interconnect in integrated circuits, motivations, trends and difficulties, Term Paper for EECS 598, Nanotechnology . Google ScholarP. Scheuerpflug, M. Hauck and J. Fricke, J. Non-Cryst, Solids 145, 196 (1992). Crossref, Google ScholarJ. A. Ruffneret al., Thin Solid Films 332, 356 (1998). Crossref, Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 03 Metrics History KeywordsmonolithicpyroelectricinfraredCopper interconnectionPDF download
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