Fabrication and Properties of the Multi-layer Pyroelectric Thin Film Infrared Detectors

Sanhong Wang,Xiaoqing Wu,Xi Yao
DOI: https://doi.org/10.3321/j.issn:0253-987X.2001.02.009
2001-01-01
Abstract:In order to reduce the thermal dissipation from the pyroelectric film to the substrate and meet the needs of integration with silicon, the multi-layer pyroelectric thin film (MPTF) was introduced. It is mainly composed of pyroelectric sensitive layer-lead titanate, thermal isolating layer-porous silicon dioxide film, and the buffer layer-dense silicon dioxide film. A pyroelectric measuring system was built to measure the infrared response of the detector. The voltage response and the specific detectivity of the detector were also given.
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