Abstract:In this paper, the lithium tantalite (LiTaO_3) thin film has been employed as the highly sensitive element for infrared detection of compound (refrigerant) gases such as 1,1,1,2-Tetrafluoroethane (C_2 H_2 F_4) and 1,1,1,2,3,3,3-Heptafluoropropane (C_3 F_7 H). The LiTaO_3 thin film was subjected to the mid-infrared light from output transmission spectra of C_2 H_2 F_4 as well as C_3 F_7 H molecules used as sources. The technology for preparation of LiTaO_3 thin film as well as detector design and manufacturing are presented. Particular attention was paid to production of conductive electrodes, including a very thin semitransparent Au layer evaporated on the top surface of LiTaO_3 pyroelectric material. Important characteristics of the LiTaO_3 based pyroelectric system are briefly discussed. Additionally, the design, construction, and performance of the gas chamber operating as a channel for gas sensor testing is briefly described. The pyroelectric open-circuit voltage generated in LiTaO_3 was boosted with a signal processing circuit for selective high-sensitivity detection of compound gases at room temperature. The infrared (IR) filters such as titanium dioxide (TiO_2) and zinc oxide (ZnO) having narrow bandwidth and working at a normal incidence were integrated into a compact and portable pyroelectric micro-sensor before the LiTaO_3 pyroelectric element in the same package for cleaning background in a broad IR spectrum of both refrigerant gases. The performance, stability, and accuracy of fabricated LiTaO_3-based IR gas sensors operating on the pyroelectric open-circuit voltage were tested and improved. IR gas sensors designed and prepared in this study can be utilized for non-contact, sensitive, and selective detection of highly hazardous and explosive gases.

Wafer-Scale Fabrication of Silicon-Based LiTaO3 Pyroelectric Infrared Detectors by Bonding and Thinning Technology

Wavelength-selective infrared detector fabricated by integrating LiTaO<sub>3</sub> with a metamaterial perfect absorber

High responsivity of pyroelectric infrared detector based on ultra-thin (10 μm) LiTaO 3

Preparation of Si-based PZT pyroelectric thick film infrared detector

Design and Fabrication of Micromachined Pyroelectric Infrared Detector Array Using Lead Titanate Zirconate (PZT) Thin Film

Fabrication and Properties of the Multi-layer Pyroelectric Thin Film Infrared Detectors

High Specific Detectivity Infrared Detector using Crystal Ion Slicing Transferred LiTaO3 Single-crystal Thin Films

Integration and Characterization of LiTaO₃ Single Crystal Film Pyroelectric Sensor Using Mid-Infrared Metamaterial Perfect Absorber

Fast and Wide-Band Response Infrared Detector Using Porous PZT Pyroelectric Thick Film

Employing the pyroelectric effect in LiTaO 3 thin film for infrared detection of complex gases

Thinning of Lithium Niobate Wafers with a Novel Designed Lapping Tool and Measurements

A Uncooled Α-Si Infrared Detector Using Polyimide As Thermal Isolation Layer

Properties Of Pbtio3, La-Modified Pbtio3 And Pb(Zr,Ti)O-3 Thin Films And Their Application To Infrared Detectors

Fabrication of Thermal Insulation Structure for Uncooled Pyroelectric Thin Film IR Detector

Application of Pyroelectric Thin Films in Infrared Detectors

High performance THz detector based on ultra-thin LiTaO 3 crystal

Preparation and Characterization of Lead Zirconate Titanate Thin Films Grown by RF Magnetron Sputtering for Pyroelectric Infrared Detector Arrays

A Uncooled A-Si Infrared Detector with Novel Thermal Isolation Method.

Optimization of (100)-Si TMAH Etching for Uncooled Infrared Detector

Infrared detector based on crystal ion sliced LiNbO3 single-crystal film with BCB bonding and thermal insulating layer

Design, fabrication, and characterization of a high-performance CMOS-compatible thermopile infrared detector with self-test function