Abstract:In this paper, the lithium tantalite (LiTaO_3) thin film has been employed as the highly sensitive element for infrared detection of compound (refrigerant) gases such as 1,1,1,2-Tetrafluoroethane (C_2 H_2 F_4) and 1,1,1,2,3,3,3-Heptafluoropropane (C_3 F_7 H). The LiTaO_3 thin film was subjected to the mid-infrared light from output transmission spectra of C_2 H_2 F_4 as well as C_3 F_7 H molecules used as sources. The technology for preparation of LiTaO_3 thin film as well as detector design and manufacturing are presented. Particular attention was paid to production of conductive electrodes, including a very thin semitransparent Au layer evaporated on the top surface of LiTaO_3 pyroelectric material. Important characteristics of the LiTaO_3 based pyroelectric system are briefly discussed. Additionally, the design, construction, and performance of the gas chamber operating as a channel for gas sensor testing is briefly described. The pyroelectric open-circuit voltage generated in LiTaO_3 was boosted with a signal processing circuit for selective high-sensitivity detection of compound gases at room temperature. The infrared (IR) filters such as titanium dioxide (TiO_2) and zinc oxide (ZnO) having narrow bandwidth and working at a normal incidence were integrated into a compact and portable pyroelectric micro-sensor before the LiTaO_3 pyroelectric element in the same package for cleaning background in a broad IR spectrum of both refrigerant gases. The performance, stability, and accuracy of fabricated LiTaO_3-based IR gas sensors operating on the pyroelectric open-circuit voltage were tested and improved. IR gas sensors designed and prepared in this study can be utilized for non-contact, sensitive, and selective detection of highly hazardous and explosive gases.

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