Micro/Nanotribological and Mechanical Studies of Tin Thin-Film for Mems Applications

XK Cao,TM Shao,SZ Wen,Y Yao
DOI: https://doi.org/10.1080/05698190490439076
IF: 2.056
2004-01-01
Tribology Transactions
Abstract:Micro/nanotribological and mechanical characterization of TiN film and single-crystal silicon was investigated. Hardness, friction, and wear properties of both materials were measured by a nanoindenter system. The results demonstrate the similarities and differences between both materials and show that TiN film has more preferable properties in hardness and wear resistance than those of single-crystal silicon. It is more likely that a methodology based on this study can be used for evaluating the quality of micro/nanofilms, and TiN film possesses desirable micro/nanotribological and mechanical characterization for MEMS applications.
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