Interface Studies And Electronic Properties Of Silicon Based Nd-Doped Bismuth Titanate

Yongyuan Zang,Dan Xie,Yehui Xiao,Yong Ruan,Tianling Ren,Litian Liu
DOI: https://doi.org/10.1080/10584580802092423
2008-01-01
Integrated Ferroelectrics
Abstract:The metal-ferroelectric-insulator-semiconductor (MFIS) structure were fabricated and investigated. The Bi3.15Nd0.85Ti3O12 (BNdT) thin films were deposited on the Si substrates by sol-gel process with HfO2, SiO2 and Si3N4 as the buffer layers. Perovskite crystalline was obtained and the ferroelectric polarization-voltage (P-V) hysteresis was studied for the Pt/BNdT/Pt/Ti/SiO2/Si(100) and Pt/BNdT/HfO2/Si(100) capacitors. Good interfacial properties were examined between the BNdT thin film and Si substrate. Memory windows of the Pt/BNdT/HfO2/Si(100) structure were in the range of 0.9v-1.2v when the thickness of the HfO2 buffer layer varied from 3 nm to 5 nm, exhibiting a considerable memory effect in the capacitors.
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