Temperature Coefficients Of Grain Boundary Resistance Variations In A Zno/P-Si Heterojunction

Liu Bingce,Liu Cihui,Xu Jun,Yi Bo
DOI: https://doi.org/10.1088/1674-4926/31/12/122001
2010-01-01
Journal of Semiconductors
Abstract:Heteroepitaxial undoped ZnO films were grown on Si (100) substrates by radio-frequency reactive sputtering, and then some of the samples were annealed at N-2-800 degrees C (Sample 1, S1) and O-2-800 degrees C (Sample 2, S2) for 1 h, respectively. The electrical transport characteristics of a ZnO/p-Si heterojunction were investigated. We found two interesting phenomena. First, the temperature coefficients of grain boundary resistances of S1 were positive (positive temperature coefficients, PTC) while that of both the as-grown sample and S2 were negative (negative temperature coefficients, NTC). Second, the I-V properties of S2 were similar to those common p-n junctions while that of both the as-grown sample and S1 had double Schottky barrier behaviors, which were in contradiction with the ideal p-n heterojunction model. Combined with the deep level transient spectra results, this revealed that the concentrations of intrinsic defects in ZnO grains and the densities of interfacial states in ZnO/p-Si heterojunction varied with the different annealing ambiences, which caused the grain boundary barriers in ZnO/p-Si heterojunction to vary. This resulted in adjustment electrical properties of ZnO/p-Si heterojunction that may be suitable in various applications.
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