Fabrication of Irregular Optical Phased Arrays on Silicon-On-Insulator Wafers

Feng Xiao,Guangyuan Li,Yanping Li,Anshi Xu
DOI: https://doi.org/10.1117/1.2902475
IF: 1.3
2008-01-01
Optical Engineering
Abstract:A 16- and a 32-element irregular optical phased array based on silicon-on-insulator materials were fabricated. Such a device consists of an array of irregularly spaced single-mode waveguides, each of which has a specific length to give an appropriate phase retardation controllable by the wavelength. The optical beam can be steered continuously in the range of about 0 to 3 deg, corresponding to the wavelength varying from 1550.7 to 1551.9 nm. (C) 2008 Society of Photo-Optical Instrumentation Engineers.
What problem does this paper attempt to address?