Design and Fabrication of Multimode Interference Coupler with Strong Confinement Structure on Silicon-On-Insulator

YZ Tang,WH Wang,YM Wu,JY Yang,YL Wang
DOI: https://doi.org/10.1117/1.1804545
IF: 1.3
2004-01-01
Optical Engineering
Abstract:A 1x8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error. (C) 2004 Society of Photo-Optical Instrumentation Engineers.
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