Integrated MMI Optical Couplers and Optical Switches in Silicon-on-Insulator Technology

JH Yu,HZ Wei,XF Zhang,QF Yan,JS Xia
DOI: https://doi.org/10.1117/12.445077
2001-01-01
Abstract:Integrated multimode interference coupler based on silicon-on-insulator has been become a kind of more and more attractive device in optical systems. Thin cladding layers (<1.0mum) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the design and fabrication of multimode interference (MMI) optical couplers and optical switches in SOI technology.
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