One And Two-Dimensional Mmi Device With Strong Confinement Structure On Soi

Yanzhe Tang,Yiling Sun,Wenhui Wang,Yuelin Wang-,Yarning Wu,Jianyi Yang,Xiaoqing Jiang
DOI: https://doi.org/10.1109/GROUP4.2004.1416712
2004-01-01
Abstract:One and two-dimensional MMI couplers with strong confinement on SOI were fabricated. Analysis shows that it has lower imbalance, wider bandwidth and better fabrication tolerance. A special process was proposed to eliminate the alignment error.
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