Design and Fabrication of Ultracompact 3-Db MMI Coupler in Silicon-on-Insulator

Yan Qingfeng,Yu Jinzhong,Liu Zhongli
DOI: https://doi.org/10.3969/j.issn.1674-4926.2003.02.005
2003-01-01
Chinese Journal of Semiconductors
Abstract:An ultracompact 3-dB coupler is designed and fabricated in silicon-on-insulator,based on 1×2 line tapered multimode interference (MMI) coupler.Comparing with the conventional straight MMI coupler,the device is ~40% shorter in length.The device exhibits uniformity of 1.3dB and excess loss of 2.5dB.
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