Fabrication of irregular optical phased arrays on SOI wafers

Feng Xiao,Guangyuan Li,Yan Li,Anshi Xu

DOI: https://doi.org/10.1109/INOW.2007.4302951

2007-01-01

Abstract:A 32/16-element irregular optical phased array (IOPA) irregularly spaced single-mode waveguide controlled by wavelength was fabricated based on SOI materials. The experiment shows that the optical beam can be steered continuously from 0deg to about 3deg.

What problem does this paper attempt to address?

Fabrication of Irregular Optical Phased Arrays on Silicon-On-Insulator Wafers

Feng Xiao,Guangyuan Li,Yanping Li,Anshi Xu

DOI: https://doi.org/10.1117/1.2902475

IF: 1.3

2008-01-01

Optical Engineering

Abstract:A 16- and a 32-element irregular optical phased array based on silicon-on-insulator materials were fabricated. Such a device consists of an array of irregularly spaced single-mode waveguides, each of which has a specific length to give an appropriate phase retardation controllable by the wavelength. The optical beam can be steered continuously in the range of about 0 to 3 deg, corresponding to the wavelength varying from 1550.7 to 1551.9 nm. (C) 2008 Society of Photo-Optical Instrumentation Engineers.
A Flexible on-chip phase calibration method for optical phased array

Zhiyan Zhou,Zhaoyang Zhang,Hui Yu,Tingge Dai,Jianyi Yang

DOI: https://doi.org/10.1117/12.2651795

2022-01-01

Abstract:We demonstrate a 32-element silicon OPA chip with on-chip phase calibration. The on-chip phase calibration structure consists of interferometric structures and germanium silicon photodetectors (GeSi PDs). This structure can control any angle deflection within the scanning range without detecting the far-field patterns. In the horizontal direction, the on-chip phase calibration structure is used to achieve beam steering within the 36 degrees scanning range, and the side-lobe suppression ratio can be close to 7dB.
Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Jingye Chen,Yanling Sun,Shijie Wei,Xiang'e Han,Yaocheng Shi

DOI: https://doi.org/10.1109/oecc.2018.8729918

2018-01-01

Abstract:An 1 × 8 optical phased array on silicon-on-insulator platform is proposed and demonstrated. Silicon waveguides with non-uniform widths enable beam steering with compressed high order grating lobes.
A 8×8 Arrayed Waveguide Grating Router Based on SOI Platform

Yue Wu,Ti-ng Ting Lang,Jinyan Song,Jian-Jun He

DOI: https://doi.org/10.1109/icocn.2017.8121403

2017-01-01

Abstract:We design and experimentally fabricate a 8×8 arrayed waveguide grating router(AWGR) with a channel spacing of400 GHz based on silicon-on-insulator (SOI) platform. The arrayed waveguide region of this device is horseshoe-shaped to realize a small footprint of 730 μm × 580 μm. Experimental results show good cyclic performance. The crosstalk and insertion loss are about -21 dB and 2.7 dB, respectively. This compact device can be used in optical interconnect systems.
An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Zhiyan Zhou,Qikai Huang,Zhaoyang Zhang,Hui Yu,Jianyi Yang,Yuehai Wang

DOI: https://doi.org/10.1109/lpt.2023.3264633

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate an on-chip phase calibration method in the silicon-based optical phased array (OPA) using multimode interferences (MMIs) and germanium silicon photodetectors (GeSi PDs), which are integrated at the end of the grating array. Two groups of MMIs with staggered symmetrical distribution are utilized to obtain the phase difference between adjacent gratings and linked to the PDs. With this method, a $1\times32$ OPA with thirty-two PDs realizes a $36.4^{\circ } \,\, \times11.5^{\circ }$ beam steering range without any blind spot, and the optimal side-lobe suppression ratio is 9.3 dB.
Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Km Jia,Wh Wang,Yz Tang,Yr Yang,Jy Yang,Xq Jiang,Ym Wu,Mh Wang,Yl Wang

DOI: https://doi.org/10.1117/12.576059

2005-01-01

Abstract:In this paper we design and fabricate the first mirror-integrated silicon-on-insulator-based (SOI-based) arrayed-waveguide grating (AWG) with working functions. The fabricated AWG has a channel spacing of 1.6 nm centered at 1556 nm. We substitute the bent waveguides array in the traditional AWG configuration by adopting the structure of the mirror-integrated straight waveguides. Theoretical advantages of the new structure are demonstrated. Detailed description of the design procedure and the fabrication process is provided. Test results of both the traditional AWG and this design are delineated and analyzed, which shows that the total length of the waveguide array is reduced from 3.14 cm to 2.53 cm, and the holistic structure also becomes more compact. The crosstalk of the fabricated 1x8 AWG is better than -20 dB. The typical on-chip insertion loss is about 10 dB. Losses caused by the mirrors and the waveguides transmission are about 4.2 dB, both of which resulted from the imprecision in the fabrication process.
Compact Integrated Waveguide Turning Mirror in SOI

Wenhui Wang,Yanzhe Tang,Liping Cui,Yaming Wu,Jianyi Yang,Yuelin Wang

DOI: https://doi.org/10.1117/12.521682

2004-01-01

Abstract:Planar lightwave circuits based on silicon are playing important roles in integrated optical systems. The integrated waveguide turning mirror (IWTM) is essential component for the compactness of optical devices. We designed and fabricated an integrated waveguide turning mirror with a 90° directional change in SOI. The mirror was etched by induct-coupled-plasma etching (ICP) first. Then the surface was enhanced by wet anisotropic etching. This two-step process introduced a compact IWTM with smooth and vertical surface. Compared with the mirror fabricated by wet anisotropic etching only, the mirror fabricate by the two-step process is better to meet the requirement of compact design.
Dense III-V/Si Phase-Shifter Based Optical Phased Array

Weiqiang Xie,Tin Komljenovic,Jinxi Huang,Michael L. Davenport,John E. Bowers

DOI: https://doi.org/10.48550/arXiv.1904.01104

2019-01-15

Abstract:High-performance integrated optical phased arrays (OPAs) are crucial for building up energy-efficient solid-state beam steering systems on a chip. This work demonstrates a first heterogeneous III-V/Si phase-shifter based OPA that utilizes III-V multiple quantum well (MQW) structures to provide superior performance. Demonstrated phase shifters have Vpi of only 0.45 V and residual amplitude modulation (RAM) of only 0.15 dB at 1550 nm for 2pi phase shift with low power consumption of less than 3 nW, which are, to the best our knowledge, the state-of-the-art performance with a record low operating voltage, low power consumption, and low RAM in on-chip OPAs. Their bandwidth is >1 GHz across 200 nm wavelength range. Wavelength tuning is used to demonstrate two-dimensional beam steering with a field of view of 28x51 degree in the 32-channel OPA with an emitter-array pitch of 2 um. Side-mode suppression ratio of 16 dB is also achieved. The high-performance heterogeneous OPA paves the way for scalable and efficient on-chip beam steerers with large steering range and high beam quality.

Applied Physics,Optics
A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Zhaoyang Zhang,Hui Yu,Bei Chen,Penghui Xia,Zhiyan Zhou,Qikai Huang,Tingge Dai,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/LPT.2022.3202787

IF: 2.6

2022-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a 1 x 256 optical phased array based on the tri-layer Si3N4-on-Si platform. By optimizing the thickness and vertical position of the Si3N4 overlay, the grating antenna exhibits a ultra-low emission rate of 13.9 dB/cm at 1550 nm and a large bandwidth of 120 nm. Based on the optimized Si3N4 assisted grating antenna, the OPA realizes an ultra-sharp beam divergence of 0.154 degrees x 0.0435 degrees, a two-dimensional beam steering range of 45.6 degrees x 16.1 degrees , and a side lobe suppression ratio better than 10.8 dB.
A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

By Li,Xq Jiang,Jy Yang,Mh Wang

DOI: https://doi.org/10.1117/12.444529

2001-01-01

Abstract:A novel type of compact-structure arrayed-waveguide grating (AWG) device is designed based on silicon-on-insulator (SOI) material. The size of the eight-channel AWG device is about 1.2x 1.2cm(2). In order to compensate TE-TM polarization, a total internal reflection (TIR) mirror is fabricated at the middle of each arrayed waveguide. When reflecting on this mirror, TE and TM modes have different phase changes. Through calculating the incidence angle, lightwaves of TE and TM modes which are at the same order can converge into the same output waveguide, thus the TE-TM shift is diminished. Due to this TIR mirror design, the total length of curved waveguides is reduced, while more straight waveguides are used. So the curved waveguide loss is reduced and the device size is diminished. The experimental results are given and feasibility of fabrication is tested.
A Novel Compact-Structure Arrayed-Waveguide Grating Device

Xiaoqing JIANG,Baiyang Li,Jianyi Yang,Minghua Wang

DOI: https://doi.org/10.3969/j.issn.1674-4926.2002.06.015

2002-01-01

Abstract:Arrayed-waveguide grating (AWG) device,a novel compact-structure,is presented based on silicon-on-insulator (SOI) material.A total internal reflection (TIR) waveguide mirror is fabricated at the middle of each arrayed waveguide.An approach of compensating TE-TM mode polarization is presented by using the phase difference,which is caused by TIR at the waveguide mirror.This AWG device has advantage for its small size and simple technigue of fabrication.The experimental results are given and the feasibility of fabrication is tested.
Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Wenlei Li,Jingye Chen,Dong Liang,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.475350

IF: 3.8

2022-01-01

Optics Express

Abstract:Optical phased array (OPA) based on silicon photonics is considered as a promising candidate for realizing solid-state beam steering. However, the high refractive index contrast of the silicon waveguides leads to conventional silicon based OPA suffering from large random phase errors, which require complex post-processing such as time-consuming phase calibration. We propose and demonstrate a calibration-free silicon OPA with optimized optical waveguides width as well as the compact 90° waveguide bends beyond the single mode regime. By using grouped cascaded phase shifters, it is able to reduce the number of control electrodes from N to log2(N). A 16-channel OPA has been demonstrated with continuous beam steering over the field of view controlled by only four control voltages without any calibration.
On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Yunfei Niu,Yunlong Niu,Xiaopeng Hu,Yijia Hu,Qingyang Du,Shaoliang Yu,Tao Chu

DOI: https://doi.org/10.1515/nanoph-2023-0323

IF: 7.5

2023-01-01

Nanophotonics

Abstract:The ability to manipulate light propagation sets the foundations for optical communication and information processing systems. With the ever-growing data capacity and data rate, photonic integrated circuits have attracted increasing attentions of researchers owing to their large-volume integration capacity and fast operation speed. In this work, we proposed and experimentally demonstrated a new wavefront shaping method using waveguide arrays with hyperbolic secant refractive index profiles. Through theoretically analyzing the diffraction and coherence properties, we found that a single waveguide array can perform both imaging and phase transformation, which are the two primary functions of optical lenses. We further expanded this function and fabricated the corresponding devices on a silicon nitride waveguide platform. Deterministic beam shaping, such as focusing, expansion, collimation, and steering, is successfully realized. This wavefront control method exhibits the potential for on-chip optical routing, ranging, sensing, etc., with high integration density and scalability.
Horseshoe-Shaped 16×16 Arrayed Waveguide Grating Router Based on SOI Platform

Yue Wu,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2017.s4j.3

2017-01-01

Abstract:We design and experimentally demonstrate a horseshoe-shaped 16 × 16 arrayed waveguide grating router with a channel spacing of 200 GHz based on SOI platform. The minimum insertion loss and the crosstalk are -3.5 dB and −16 dB, respectively.
Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

zhaoyang zhang,zhiyan zhou,yuehai wang,jianyi yang

DOI: https://doi.org/10.1117/12.2624750

2022-01-01

Abstract:We demonstrate a 63-channel grating-lobe-free optical phased array, in which end-fire antennas were fabricated with a pitch of 775 nm to eliminate grating lobe. Phase mismatch was configured to suppress the optical crosstalk in the dense waveguides. Two-dimensional beam steering within 16°× 2.7° were presented by thermal phase shifting and wavelength tuning.
Blueprint for Large-Scale Silicon Optical Phased Array Using Electro-Optical Micro-Ring Pixels.

Che Zhao,Chao Peng,Weiwei Hu

DOI: https://doi.org/10.1038/s41598-017-18040-3

IF: 4.6

2017-01-01

Scientific Reports

Abstract:We propose a modularized architecture of a large-scale optical phased array (OPA) on a silicon on insulator (SOI) platform, using electro-optical (EO) pixels. Each pixel contains a directional coupler, a micro-ring phase shifter, and a grating optical antenna, on a compact configuration of area 50 μm × 50 μm, with optical and electrical interconnections. Moreover, we present an exemplary blueprint of an OPA consisting of 32 × 32 EO pixels, which sets the width of the main lobe as 0.04° × 0.04° and the field of view as 1.78°. By applying an over-coupled condition, the modulation efficiency and the accompanying intensity modulation are balanced, thus, the OPA performance is not severely degraded. The discussion on the fabrication tolerance shows that the proposed architecture is robust and feasible regarding the state-of-the-art fabrication process, and the performance of the main lobe width and field of view can be further optimized by a larger system size and smaller pixel size. Furthermore, the complexity of interconnections linearly depends on the number of rows and columns, making it highly scalable.
Design of Narrow Channel Spacing Photonic Wire Awg on Soi with Three Stigmatic Points

Ren Bai,Ao Shen,Yubo Li,Yinlei Hao,Xiaoqing Jiang,Jianyi Yang

DOI: https://doi.org/10.1117/12.869951

2010-01-01

Abstract:In this paper, an accurate Fourier Optics method of designing AWG demultiplexer based on high-index-contract Silicon-on-Insulator (SOI) materials is presented. The typical SOI photonic wire waveguide has a cross section of 400×340nm2 satisfying single-mode condition, and operating central wavelength is 1.5500μm. A three-stigmatic-points method is also applied in order to improve the accuracy, considering the aberration theory. Furthermore, our AWG has another important characteristic--the flat field of the output ports. In the example presented here, we design a 1×256 channel AWG with 0.1-nm channel spacing. The simulation result shows that the insert loss is almost 0dB for the central and peripheral output ports as well, representing a good uniformity. Meanwhile, the crosstalk to the adjacent channel is 14.4dB. Free spectral region (FSR) equals to 30nm as designed.
High-Efficiency, Wide Working Bandwidth Antenna Based on SOI Platform for Optical Phased Array

Zihao Wang,Jiali Liao,Yixiang Xie,Yanling Sun,Xifeng Li,Wei Li

DOI: https://doi.org/10.3390/mi12080996

IF: 3.4

2021-08-21

Micromachines

Abstract:A novel structure of a subwavelength surface optical antenna for optical phased array is proposed in this paper. An asymmetric vertical grating structure is applied to achieve high emission efficiency (73% at 1550 nm). Optical antennas with large fabrication tolerances can also maintain a wide working bandwidth of 1 dB between 1350 and 1850 nm. The far-field scanning characteristics of 16-channel optical phased array are investigated in this study by employing the proposed antenna. The results show that the background suppression without considering side lobes caused by the antenna arrangement is −24.5 dB when the phase difference is 0 and when the scan range is as large as ±14.8° × 73.6°.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Zhaoyang Zhang,Tingge Dai,Qiang Zhang,Qikai Huang,Hui Yu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.2645523

2022-01-01

Abstract:We demonstrate 32-channel dispersive optical phased arrays on a Si3N4-on-SOI integration platform. The phase difference is introduced by the arrayed waveguide. Beam steering in phased-array direction with an aliasing-free range of 22.4 degrees and free spectrum ranges of similar to 60 nm and similar to 6 nm is achieved. Meanwhile, the main lobe is deflected simultaneously by 19.67 degrees in the other direction by tuning the wavelength from 1500 nm to 1630 nm. Measurement results show that the dispersive optical phased array provides a compact, low-power and massively parallel solution for LiDAR applications.
SOI-based Arrayed Waveguide Grating Router with grating couplers fabricated in a single shallow etching step

Chen Yang,Jun Zou,Tingting Lang,Jian-Jun He

DOI: https://doi.org/10.1364/acpc.2015.asu2a.22

2015-01-01

Abstract:We experimentally demonstrate a 8×8 arrayed waveguide grating router (AWGR) based on silicon-on-insulator (SOI) platform. The minimum insertion loss and the crosstalk are 1.90 dB and -15 dB, respectively.

Fabrication of irregular optical phased arrays on SOI wafers

Fabrication of Irregular Optical Phased Arrays on Silicon-On-Insulator Wafers

A Flexible on-chip phase calibration method for optical phased array

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

A 8×8 Arrayed Waveguide Grating Router Based on SOI Platform

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Mirror-Integrated Arrayed-Waveguide Grating On Silicon-On-Insulator

Compact Integrated Waveguide Turning Mirror in SOI

Dense III-V/Si Phase-Shifter Based Optical Phased Array

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

A Novel Compact-Structure Arrayed-Waveguide Grating Device

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Horseshoe-Shaped 16×16 Arrayed Waveguide Grating Router Based on SOI Platform

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Blueprint for Large-Scale Silicon Optical Phased Array Using Electro-Optical Micro-Ring Pixels.

Design of Narrow Channel Spacing Photonic Wire Awg on Soi with Three Stigmatic Points

High-Efficiency, Wide Working Bandwidth Antenna Based on SOI Platform for Optical Phased Array

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

SOI-based Arrayed Waveguide Grating Router with grating couplers fabricated in a single shallow etching step