A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Zhaoyang Zhang,Hui Yu,Bei Chen,Penghui Xia,Zhiyan Zhou,Qikai Huang,Tingge Dai,Yuehai Wang,Jianyi Yang
DOI: https://doi.org/10.1109/LPT.2022.3202787
IF: 2.6
2022-01-01
IEEE Photonics Technology Letters
Abstract:We demonstrate a 1 x 256 optical phased array based on the tri-layer Si3N4-on-Si platform. By optimizing the thickness and vertical position of the Si3N4 overlay, the grating antenna exhibits a ultra-low emission rate of 13.9 dB/cm at 1550 nm and a large bandwidth of 120 nm. Based on the optimized Si3N4 assisted grating antenna, the OPA realizes an ultra-sharp beam divergence of 0.154 degrees x 0.0435 degrees, a two-dimensional beam steering range of 45.6 degrees x 16.1 degrees , and a side lobe suppression ratio better than 10.8 dB.
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