Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Multi-Line Selective Optical Phased Array with Improved Uniformity of Radiated Beam Patterns

Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering

Integrated lithium niobate optical phased array for two-dimensional beam steering

Design of Monolithic 2D Optical Phased Arrays Heterogeneously Integrated with On-Chip Laser Arrays Based on SOI Photonic Platform

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Increasing the Field-of-View Radiation Efficiency of Optical Phased Antenna Arrays

Dense III-V/Si Phase-Shifter Based Optical Phased Array

Silicon Nitride Assisted 1×64 Optical Phased Array Based on a SOI Platform.

Fast-speed and Low-Power-consumption Optical Phased Array Based on Lithium Niobate Waveguides

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Optimization of a programmable λ /2-pitch optical phased array

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Energy-efficient integrated silicon optical phased array

Serpentine optical phased arrays for scalable integrated photonic LIDAR beam steering

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Development, calibration and characterization of silicon photonics based optical phased arrays

Fast-speed and low-power-consumption optical phased array based on thin-film lithium niobate platform

A Flexible on-chip phase calibration method for optical phased array