Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.

Silicon Nitride Assisted 1×64 Optical Phased Array Based on a SOI Platform.

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Blueprint for Large-Scale Silicon Optical Phased Array Using Electro-Optical Micro-Ring Pixels.

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Silicon Optical Phased Array Hybrid Integrated with III–V Laser for Grating Lobe-Free Beam Steering

Dense III-V/Si Phase-Shifter Based Optical Phased Array

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Fast-speed and Low-Power-consumption Optical Phased Array Based on Lithium Niobate Waveguides

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

A Flexible on-chip phase calibration method for optical phased array

Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

Fast-speed and low-power-consumption optical phased array based on thin-film lithium niobate platform

Design of Monolithic 2D Optical Phased Arrays Heterogeneously Integrated with On-Chip Laser Arrays Based on SOI Photonic Platform

Silicon Optical-Phased-Array Prototypes Using Electro-Optical Phase Shifters

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Ultra-Compact Birefringence-Compensated Arrayed Waveguide Grating Triplexer Based on Silicon-On-Insulator