Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Large-Scale Optical Phased Array Based on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform

Silicon rich nitride-lithium niobate on insulator platform for photonics integrated circuits

Monolithically Integrated Multilayer Silicon Nitride-on-Silicon Waveguide Platforms for 3-D Photonic Circuits and Devices.

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Two-dimensional Multi-Layered SiN-on-SOI Optical Phased Array with Wide-Scanning and Long-Distance Ranging

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

Development, calibration and characterization of silicon photonics based optical phased arrays

Multilayer Silicon Nitride-On-Silicon Integrated Photonic Platforms

Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

Integrated Photonic Devices And Circuits In Multilayer Silicon Nitride-On-Silicon Platforms

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Wide-angle Beam Steering of Silicon Nitride Optical Phase Array at 532 Nm

Silicon Nitride Assisted 1×64 Optical Phased Array Based on a SOI Platform.

Millimeter-Long Silicon Photonic Antenna for Optical Phased Arrays at 2-μm Wavelength Band

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Increasing the Field-of-View Radiation Efficiency of Optical Phased Antenna Arrays