Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering

Two dimensional beam forming and steering based on silicon nitride 1 × 32 optical phased array

Increasing the Field-of-View Radiation Efficiency of Optical Phased Antenna Arrays

Silicon-rich silicon nitride CMOS platform for integrated optical phased arrays

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Design and analysis of single-electrode integrated lithium niobate optical phased array for two-dimensional beam steering

Silicon Optical Phased Array Hybrid Integrated with III–V Laser for Grating Lobe-Free Beam Steering

Hybrid integrated thin-film lithium niobate-silicon nitride electro-optical phased array incorporating silicon nitride grating antenna for two-dimensional beam steering

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Development of Nitride-Based Optical Phased Array at 1092 Nm for the Optical Addressing of 88sr+ Ion

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Integrated lithium niobate optical phased array for two-dimensional beam steering

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Silicon Nitride Assisted 1×64 Optical Phased Array Based on a SOI Platform.

High-speed 2D Beam Steering Based on a Thin-Film Lithium Niobate Optical Phased Array with a Large Field of View

Chip-scale blue light phased array

Two-dimensional Silicon Optical Phased Array with Large Field of View.