Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Jingye Chen,Yanling Sun,Shijie Wei,Xiang'e Han,Yaocheng Shi

DOI: https://doi.org/10.1109/oecc.2018.8729918

2018-01-01

Abstract:An 1 × 8 optical phased array on silicon-on-insulator platform is proposed and demonstrated. Silicon waveguides with non-uniform widths enable beam steering with compressed high order grating lobes.

What problem does this paper attempt to address?

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

zhaoyang zhang,zhiyan zhou,yuehai wang,jianyi yang

DOI: https://doi.org/10.1117/12.2624750

2022-01-01

Abstract:We demonstrate a 63-channel grating-lobe-free optical phased array, in which end-fire antennas were fabricated with a pitch of 775 nm to eliminate grating lobe. Phase mismatch was configured to suppress the optical crosstalk in the dense waveguides. Two-dimensional beam steering within 16°× 2.7° were presented by thermal phase shifting and wavelength tuning.
Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Zhaoyang Zhang,Qikai Huang,Zhiyan Zhou,Yuehai Wang,Hui Yu,Jianyi Yang

DOI: https://doi.org/10.1364/acpc.2021.t4a.149

2021-01-01

Abstract:We demonstrate a 64-channel optical phased array based on carrier-depletion phase shifters. It offers ultra-high operation speed (0.7GHz phase shifter bandwidth) and ultra-low power consumption $(0.45\text{nW}/\pi)$ , which accelerates beam steering greatly.
Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Wenlei Li,Jingye Chen,Dong Liang,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.475350

IF: 3.8

2022-01-01

Optics Express

Abstract:Optical phased array (OPA) based on silicon photonics is considered as a promising candidate for realizing solid-state beam steering. However, the high refractive index contrast of the silicon waveguides leads to conventional silicon based OPA suffering from large random phase errors, which require complex post-processing such as time-consuming phase calibration. We propose and demonstrate a calibration-free silicon OPA with optimized optical waveguides width as well as the compact 90° waveguide bends beyond the single mode regime. By using grouped cascaded phase shifters, it is able to reduce the number of control electrodes from N to log2(N). A 16-channel OPA has been demonstrated with continuous beam steering over the field of view controlled by only four control voltages without any calibration.
Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Zhaoyang Zhang,Tingge Dai,Qiang Zhang,Qikai Huang,Hui Yu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1117/12.2645523

2022-01-01

Abstract:We demonstrate 32-channel dispersive optical phased arrays on a Si3N4-on-SOI integration platform. The phase difference is introduced by the arrayed waveguide. Beam steering in phased-array direction with an aliasing-free range of 22.4 degrees and free spectrum ranges of similar to 60 nm and similar to 6 nm is achieved. Meanwhile, the main lobe is deflected simultaneously by 19.67 degrees in the other direction by tuning the wavelength from 1500 nm to 1630 nm. Measurement results show that the dispersive optical phased array provides a compact, low-power and massively parallel solution for LiDAR applications.
High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Zhaoyang Zhang,Hui Yu,Qikai Huang,Zhiyan Zhou,Bei Chen,Tingge Dai,Huiye Qiu,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/lpt.2022.3151059

IF: 2.6

2022-03-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a silicon $1 imes 64$ optical phased array by using carrier-depletion-based phase shifters. The 5-mm-long phase shifter exhibits an electro-optic bandwidth of 700 MHz, a modulation efficiency of 2.3 V.cm, and an ultra-low power consumption of < 0.45 nW/$oldsymbol {pi }$ . A steering range of ±18° is realized in the phased-array axis by tuning the phase of each antenna. Besides, the beam steering in the other (wavelength-controlled) axis by tuning the wavelength achieves a dispersion efficiency of 0.17° /nm. Although the carrier-depletion effect induces a nonuniform optical amplitude distribution among the antenna array, the OPA chip is still able to form high-quality far-field beam patterns with side lobe suppression ratios of $oldsymbol {sim }10$ dB. Our measurement and simulation results indicate that the carrier-depletion-based OPA is a promising candidate for future high-speed and power-efficient solid-state Lidars.

engineering, electrical & electronic,optics,physics, applied
Silicon Optical Phased Array Hybrid Integrated with III–V Laser for Grating Lobe-Free Beam Steering

Jingye Chen,Shi Zhao,Wenlei Li,Xiaobin Wang,Xiang'e Han,Yaocheng Shi

DOI: https://doi.org/10.3390/photonics11100952

IF: 2.536

2024-10-11

Photonics

Abstract:A silicon photonics-based optical phased array (OPA) is promising for realizing solid-state and miniature beam steering. In our work, a 1 × 16 silicon optical phased array (OPA) hybrid integrated with a III–V laser is proposed and demonstrated. The III–V laser chip is vertically coupled with a silicon OPA chip based on a chirped grating coupler with a large bandwidth. The coupling efficiency reaches up to 90% through utilizing the metal reflector underneath the silicon oxide layer. The one-dimensional antenna array comprising silicon waveguides with half-wavelength spacing enables beam steering with none high-order grating lobes in a 180° field of view. The measured beam steering angle of the hybrid integrated OPA chip is ±25°, without grating lobes, and the suppression ratio of the side-lobes is larger than 9.8 dB with phase calibration.

optics
Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

Jun Zou,Xianxin Jiang,Tingting Lang,Jianjun He

DOI: https://doi.org/10.1109/CLEOPR.2013.6600263

2013-01-01

Abstract:We have demonstrated an ultra-compact birefringence-compensated arrayed waveguide grating (AWG) triplexer based on silicon nanowire waveguide. The cross-order design is employed and the device has a small footprint of 0.18×0.12 mm2. The normalized losses for TM polarization for three channels are less than 4 dB with the crosstalk better than 18 dB. The polarization dependent wavelength shift (PDλ) is less than 2.5 nm for three channels operating at the wavelength range of 1490-1550 nm by using angled star couplers in combination with different diffraction orders for the two polarizations.
A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Zhaoyang Zhang,Hui Yu,Bei Chen,Penghui Xia,Zhiyan Zhou,Qikai Huang,Tingge Dai,Yuehai Wang,Jianyi Yang

DOI: https://doi.org/10.1109/LPT.2022.3202787

IF: 2.6

2022-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate a 1 x 256 optical phased array based on the tri-layer Si3N4-on-Si platform. By optimizing the thickness and vertical position of the Si3N4 overlay, the grating antenna exhibits a ultra-low emission rate of 13.9 dB/cm at 1550 nm and a large bandwidth of 120 nm. Based on the optimized Si3N4 assisted grating antenna, the OPA realizes an ultra-sharp beam divergence of 0.154 degrees x 0.0435 degrees, a two-dimensional beam steering range of 45.6 degrees x 16.1 degrees , and a side lobe suppression ratio better than 10.8 dB.
Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Christopher T. Phare,Min Chul Shin,Steven A. Miller,Brian Stern,Michal Lipson

DOI: https://doi.org/10.48550/arXiv.1802.04624

2018-02-13

Abstract:Chip-scale optical phased arrays could enable compact beam steering and LIDAR for autonomous vehicles, precision robotics, and free-space optical communications. Because these applications demand wide angle beam steering as well as high optical power in the output beam, a natural design choice would be to space the array emitters at a half-wavelength pitch, as is common in radiofrequency phased arrays. Optical phased arrays, however, unlike RF phased arrays, have been limited by the tradeoff between field of view (i.e. angle steering) and beamforming efficiency (i.e. optical power in the output beam). This tradeoff exists because optical phased arrays rely on waveguides as emitters, which suffer from strong crosstalk when placed in close proximity relative to their mode size. Here we overcome these limitations and demonstrate a platform for optical phased arrays with 180° field of view, where more than 72 percent of the power is carried in a single diffraction-limited beam even when steered up to 60° off-axis. Our platform leverages high index-contrast, dispersion-engineered waveguides spaced one half-wavelength apart without incurring crosstalk.

Applied Physics,Optics
Grating Lobe-Free Silicon Optical Phased Array with Periodically Bending Modulation of Dense Antennas

Dong Liang,Wenlei Li,Xiaobin Wang,Xu Zhao,Zichen Guo,Xiang'e Han,Jingye Chen,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/oe.479150

IF: 3.8

2023-01-01

Optics Express

Abstract:A grating lobe-free silicon optical phased array with large field of view is demonstrated. Antennas with periodically bending modulation are spaced at half wavelength or less. The experimental results show that the crosstalk between adjacent waveguides is negligible at 1550 nm wavelength. Additionally, to reduce the optical reflection caused by the sudden change of refractive index at the output antenna of the phased array, tapered antennas are added to the output end face so that more light will be coupled into the free space. The fabricated optical phased array shows a field of view of 120° without any grating lobes.
Fabrication of Irregular Optical Phased Arrays on Silicon-On-Insulator Wafers

Feng Xiao,Guangyuan Li,Yanping Li,Anshi Xu

DOI: https://doi.org/10.1117/1.2902475

IF: 1.3

2008-01-01

Optical Engineering

Abstract:A 16- and a 32-element irregular optical phased array based on silicon-on-insulator materials were fabricated. Such a device consists of an array of irregularly spaced single-mode waveguides, each of which has a specific length to give an appropriate phase retardation controllable by the wavelength. The optical beam can be steered continuously in the range of about 0 to 3 deg, corresponding to the wavelength varying from 1550.7 to 1551.9 nm. (C) 2008 Society of Photo-Optical Instrumentation Engineers.
Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

Jun Zou,Fangyuan Sun,Changhui Wang,Ming Zhang,Junnan Wang,Tingting Lang,Xuyang Wang,Zichun Le,Jian-Jun He

DOI: https://doi.org/10.1016/j.optlastec.2021.107656

2022-01-01

Abstract:We compare the performance of silicon-based arrayed waveguide gratings (AWGs) with star couplers of Rowland and Confocal configurations, respectively, for both TE and TM polarizations. The star coupler with Rowland configuration and constant projection period for phased array waveguides on the tangent line at the grating pole shows sufficiently small aberration for all output channels of AWGs, achieving a better spectral performance compared to the Confocal configuration. The spectral performance of AWGs is also highly dependent on phase errors resulting from fabrication imperfections which are unavoidable in current fabrication technology, hence it is of significant importance to make the phase region of AWGs as small as possible. Using the optimized star coupler configuration, ultracompact large channel spacing AWGs employing a single bend with a different radius for each waveguide in the phase array and a S-shaped waveguide array, respectively, are fabricated and compared, together with high resolution (de)multiplexers utilizing the cascade of (N + 1) x (N + 1) AWGs and polarization combiner-rotator/rotator-splitter. High resolution ultracompact spectrometers using bidirectional (N + 1) x (N + 1) AWGs operating at TE and TM polarizations are also designed and fabricated. All the experimental results indicate that a smaller footprint for the phase region of AWGs contributes to an improved performance in their spectral responses. We also discuss the ways to reduce the size of phase region and suggest that decreasing the pitch of adjacent output waveguides on the imaging plane is an effective way. This paper provides design considerations for silicon-based AWGs towards various applications such as wavelength division multiplexing (WDM) and spectroscopic analysis.
A Flexible on-chip phase calibration method for optical phased array

Zhiyan Zhou,Zhaoyang Zhang,Hui Yu,Tingge Dai,Jianyi Yang

DOI: https://doi.org/10.1117/12.2651795

2022-01-01

Abstract:We demonstrate a 32-element silicon OPA chip with on-chip phase calibration. The on-chip phase calibration structure consists of interferometric structures and germanium silicon photodetectors (GeSi PDs). This structure can control any angle deflection within the scanning range without detecting the far-field patterns. In the horizontal direction, the on-chip phase calibration structure is used to achieve beam steering within the 36 degrees scanning range, and the side-lobe suppression ratio can be close to 7dB.
On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

Yunfei Niu,Yunlong Niu,Xiaopeng Hu,Yijia Hu,Qingyang Du,Shaoliang Yu,Tao Chu

DOI: https://doi.org/10.1515/nanoph-2023-0323

IF: 7.5

2023-01-01

Nanophotonics

Abstract:The ability to manipulate light propagation sets the foundations for optical communication and information processing systems. With the ever-growing data capacity and data rate, photonic integrated circuits have attracted increasing attentions of researchers owing to their large-volume integration capacity and fast operation speed. In this work, we proposed and experimentally demonstrated a new wavefront shaping method using waveguide arrays with hyperbolic secant refractive index profiles. Through theoretically analyzing the diffraction and coherence properties, we found that a single waveguide array can perform both imaging and phase transformation, which are the two primary functions of optical lenses. We further expanded this function and fabricated the corresponding devices on a silicon nitride waveguide platform. Deterministic beam shaping, such as focusing, expansion, collimation, and steering, is successfully realized. This wavefront control method exhibits the potential for on-chip optical routing, ranging, sensing, etc., with high integration density and scalability.
A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

By Li,Xq Jiang,Jy Yang,Mh Wang

DOI: https://doi.org/10.1117/12.444529

2001-01-01

Abstract:A novel type of compact-structure arrayed-waveguide grating (AWG) device is designed based on silicon-on-insulator (SOI) material. The size of the eight-channel AWG device is about 1.2x 1.2cm(2). In order to compensate TE-TM polarization, a total internal reflection (TIR) mirror is fabricated at the middle of each arrayed waveguide. When reflecting on this mirror, TE and TM modes have different phase changes. Through calculating the incidence angle, lightwaves of TE and TM modes which are at the same order can converge into the same output waveguide, thus the TE-TM shift is diminished. Due to this TIR mirror design, the total length of curved waveguides is reduced, while more straight waveguides are used. So the curved waveguide loss is reduced and the device size is diminished. The experimental results are given and feasibility of fabrication is tested.
Silicon Optical-Phased-Array Prototypes Using Electro-Optical Phase Shifters

Che Zhao,Haiyang Zhang,Zhong Zheng,Chao Peng,Weiwei Hu

DOI: https://doi.org/10.1364/cleo_si.2017.sm1o.4

2017-01-01

Abstract:High-speed silicon optical-phased-array (OPA) prototypes are achieved using electro-optical phase shifters with quick response (4.2 ns) and small footprint (500 μm/2π). 11.1° (1D) and 7.4° × 3.7° (2D) beam steering is observed.
Ultra-Compact Birefringence-Compensated Arrayed Waveguide Grating Triplexer Based on Silicon-On-Insulator

jun zou,xianxin jiang,xiang xia,tingting lang,jianjun he

DOI: https://doi.org/10.1109/JLT.2013.2261857

2013-01-01

Abstract:We demonstrate an ultra-compact birefringence- compensated arrayed waveguide grating (AWG) triplexer for application in optical network units (ONUs) based on silicon nanowire waveguides. The cross-order design is employed to cover three operating wavelengths of 1310, 1490 and 1550 nm for the triplexer. The large birefringence of the silicon-on-insulator (SOI) waveguide is compensated by using angled star coupler design in combination with different diffraction orders for TE and TM modes. The device has a small footprint of only 0.18×0.12 mm2. The excess loss for TM polarization for three channels is 3 ~ 4 dB and the crosstalk is better than -18 dB. The polarization dependent wavelength shift (PDλ) is reduced from about 370 nm to less than 2.5 nm for wavelength channels at 1490-1550 nm.
An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Zhiyan Zhou,Qikai Huang,Zhaoyang Zhang,Hui Yu,Jianyi Yang,Yuehai Wang

DOI: https://doi.org/10.1109/lpt.2023.3264633

IF: 2.6

2023-01-01

IEEE Photonics Technology Letters

Abstract:We demonstrate an on-chip phase calibration method in the silicon-based optical phased array (OPA) using multimode interferences (MMIs) and germanium silicon photodetectors (GeSi PDs), which are integrated at the end of the grating array. Two groups of MMIs with staggered symmetrical distribution are utilized to obtain the phase difference between adjacent gratings and linked to the PDs. With this method, a $1\times32$ OPA with thirty-two PDs realizes a $36.4^{\circ } \,\, \times11.5^{\circ }$ beam steering range without any blind spot, and the optimal side-lobe suppression ratio is 9.3 dB.
Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

GB Li,Z Gong,KM Jia,WH Long,JY Yang,XQ Jiang,YL Wang,MH Wang

DOI: https://doi.org/10.1088/0256-307x/22/12/033

2005-01-01

Abstract:A compact arrayed-waveguide grating (AWG) on the silicon-on-insulator material is designed and fabricated with employment of waveguide-integrated turning mirrors (WITMs). By properly setting the incident angle with the value of 45 degrees, the effective area of the WITM AWG is only 1.15 cm x 1.15 cm with the arrayed waveguide area of 0.6 cm x 0.6 cm. The crosstalk of the fabricated 1 x 6 AWG is better than -19 dB. The on-chip insertion loss is about -8.8 dB and the output nonuniformity is less than 0.6 dB. The polarization-dependent central wavelength shift is about 0.048 nm and the polarization dependent loss is neglectable.
Multilayered High-directional Waveguide Grating Antenna Based on Interleaved Etching for Optical Phased Arrays

Yang Bo,Qing Wang,Jinyu Wang,Yan Cai,Wencheng Yue,Shuxiao Wang,Wei Wang,Mingbin Yu

DOI: https://doi.org/10.3807/copp.2023.7.2.157

2023-01-01

Current Optics and Photonics

Abstract:We propose a highly directional waveguide grating antenna for an optical phased array, achieving high directionality of more than 97% by interleaving the trenches with different etching depths in the silicon nitride layer, and adopting a multilayered structure. Meanwhile, the multilayered structure re-duces the perturbation strength, which enables a centimeter-scale radiation length. The beam-steering range is 13.2 degrees, with a wavelength bandwidth of 100 nm. The 1-dB bandwidth of the grating is 305 nm. The multilayered grating structure has a large tolerance to the fabrication variation and is compatible with CMOS fabrication techniques.

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Silicon Optical Phased Array Hybrid Integrated with III–V Laser for Grating Lobe-Free Beam Steering

Ultra-compact arrayed waveguide grating triplexer based on silicon-on-insulator platform

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Grating Lobe-Free Silicon Optical Phased Array with Periodically Bending Modulation of Dense Antennas

Fabrication of Irregular Optical Phased Arrays on Silicon-On-Insulator Wafers

Silicon-Based Arrayed Waveguide Gratings for WDM and Spectroscopic Analysis Applications

A Flexible on-chip phase calibration method for optical phased array

On-chip Wavefront Shaping in Spacing-Varied Waveguide Arrays

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

Silicon Optical-Phased-Array Prototypes Using Electro-Optical Phase Shifters

Ultra-Compact Birefringence-Compensated Arrayed Waveguide Grating Triplexer Based on Silicon-On-Insulator

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Compact Arrayed-Waveguide Grating on Silicon-On-Insulator with Integrated Waveguide Turning Mirrors

Multilayered High-directional Waveguide Grating Antenna Based on Interleaved Etching for Optical Phased Arrays