Abstract:Silicon photonics optical phased arrays have been studied intensively in recent years. As the divergence angle of the light beam is inversely proportional to the size of optical antennas, developing long grating emitters is crucial to the implementation of large aperture optical phased arrays. However, because of the high refractive index contrast between silicon and cladding materials on silicon-on-insulator (SOI) platform and fabrication limitation, the grating strength of a conventional grating is so strong that the light can only propagate a short distance within the grating. Because of the capability to engineer the macro optical properties of materials, subwavelength structures have become important building blocks in integrated photonics. In this paper, we propose subwavelength silicon segments as a promising approach to form long grating emitters. Subwavelength segments are placed a distanced away from a conventional waveguide to assure that they only interact with the evanescent wave of the guided mode. The grating strength can be tailored to any values of interest by optimizing the dimensions and positions of subwavelength segments. As a proof-of-concept, a millimeter-long, through-etched grating and an apodized grating are designed and fabricated, which shows a divergence angle of 0.081 degrees and 0.079 degrees.

Multilayered High-directional Waveguide Grating Antenna Based on Interleaved Etching for Optical Phased Arrays

Dual-layer Waveguide Grating Antenna with High Directionality for Optical Phased Arrays

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Unidirectional Large-Scale Waveguide Grating with Uniform Radiation for Optical Phased Array.

Compact and Efficient Transverse Spliced Waveguide Grating Antenna for Integrated Optical Phased Array

Subwavelength Structure Enabled Ultra-Long Waveguide Grating Antenna.

A Milimeter Scale Long Waveguide Grating Antanna with High Directionality for Optical Phased Array

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Design and fabrication of 1 × 32 silica-based arrayed waveguide grating

Toward Practical Optical Phased Arrays Through Grating Antenna Engineering

High-Efficiency, Wide Working Bandwidth Antenna Based on SOI Platform for Optical Phased Array

Design of a Low-Crosstalk Sub-Wavelength-Pitch Silicon Waveguide Array for Optical Phased Array

An Eight-Channel 400 GHz-Spacing Etched Diffraction Grating Multi/Demultiplexer on a Nanophotonic Silicon-on-Insulator Platform

Continuously Tunable True-Time Delay Lines Based on a One-Dimensional Grating Waveguide for Beam Steering in Phased Array Antennas.

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Silica-Based Arrayed Waveguide Grating With Flattened Spectral Response Using A Multimode Interference Coupler

A Novel Design Of Compact-Structure Arrayed-Waveguide Grating Device

InP-Based Grating Antennas for High-Resolution Optical Beam Steering

Theoretical Investigation of Compact High-Resolution Interleaved Arrayed Waveguide Gratings with Multi-Layer Structures

Optical Phased Array Based on Silicon Waveguides with Non-Uniform Widths

Ultra-Long Grating Emitters For Optical Phased Array Leveraging Subwavelength Structures