Abstract:In this work, heterogeneous integration of both two-dimensional (2D) optical phased arrays (OPAs) and on-chip laser arrays based on a silicon photonic platform is proposed. The tunable multi-quantum-well (MQW) laser arrays, active switching/shifting arrays, and grating antenna arrays are used in the OPA module to realize 2D spatial beam scanning. The 2D OPA chip is composed of four main parts: (1) tunable MQW laser array emitting light signals in the range of 1480–1600 nm wavelengths; (2) electro-optic (EO) switch array for selecting the desired signal light from the on-chip laser array; (3) EO phase-shifter array for holding a fixed phase difference for the uniform amplitude of specific optical signal; and (4) Bragg waveguide grating antenna array for controlling beamforming. By optimizing the overall performances of the 2D OPA chip, a large steering range of 88.4° × 18° is realized by tuning both the phase and the wavelength for each antenna. In contrast to the traditional thermo-optic LIDAR chip with an external light source, the overall footprint of the 2D OPA chip can be limited to 8 mm × 3 mm, and the modulation rate can be 2.5 ps. The ultra-compact 2D OPA assembling with on-chip tunable laser arrays using hybrid integration could result in the application of a high-density, high-speed, and high-precision lidar system in the future.

A Flexible on-chip phase calibration method for optical phased array

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Phase Calibration of On-Chip Optical Phased Arrays via Interference Technique

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Grating-lobe-free optical phased array with 2-D circular sparse array aperture and high-efficiency phase calibration

Practical in-situ beamforming method for optical phased array LiDAR monitoring a single far-field point

Fast Beam Steering Enabled by a Chip-Scale Optical Phased Array with 8 × 8 Elements

On-chip monitoring of far-field patterns using a planar diffractor in a silicon-based optical phased array

Silicon Optical-Phased-Array Prototypes Using Electro-Optical Phase Shifters

Hybrid algorithm for initial phase calibration of optical phased array

Silicon Optical Phased Array Hybrid Integrated with III–V Laser for Grating Lobe-Free Beam Steering

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Design of Monolithic 2D Optical Phased Arrays Heterogeneously Integrated with On-Chip Laser Arrays Based on SOI Photonic Platform

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Development, calibration and characterization of silicon photonics based optical phased arrays

Densely Integrated Phase Interrogators for Low-Complexity On-Chip Calibration of Optical Phased Arrays

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Dense III-V/Si Phase-Shifter Based Optical Phased Array

Energy-efficient integrated silicon optical phased array