Abstract:Optical phased arrays (OPAs) have attracted much attention due to its potential applications in a series of advanced technologies such as LIDAR, free space communication. OPAs have many advantages, such as non-mechanical, arbitrary beam shaping and control. It has been proved that it is feasible to process OPAs with integrated optical platform. Among all the integrated optical platforms, silicon photonic platform has attracted the attention of most researchers and has achieved many important results. However, silicon photonic platform is very sensitive to processing errors and is not suitable for high power input because of its strong nonlinear effect. Silicon nitride (Si3N4) has become a research hotspot in integrated photonics due to its weak nonlinear effect and low-loss. Compared with silicon, because of its lower refractive index contrast, it is more tolerant to process changes and because of its weak nonlinear effect, it can allow higher power input, which is very suitable for processing OPAs. In this work, we propose an OPA based on 200 nm silicon nitride platform to control the two-dimensional direction of the beam by wavelength tuning. The system is simulated by FDTD solution. Finally, the scanning range of 46°×12° is realized in the wavelength range of 1500 nm to 1600 nm. The 3 dB size of a single spot is 1.8°×0.5° and a total of 600 scanning points can be obtained. This OPA can find applications in laser scanning, spectroscopy, demultiplexing and spectral pulse shaping applications.

On-chip monitoring of far-field patterns using a planar diffractor in a silicon-based optical phased array

A Flexible on-chip phase calibration method for optical phased array

An On-Chip Calibration Method for Optical Phased Array with No Blind Spot in the Steering Range

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

Practical in-situ beamforming method for optical phased array LiDAR monitoring a single far-field point

A Tri-Layer Si<sub>3</sub>N<sub>4</sub>-on-Si Optical Phased Array With High Angular Resolution

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Grating-lobe-free optical phased array with 2-D circular sparse array aperture and high-efficiency phase calibration

Multi-Line Selective Optical Phased Array with Improved Uniformity of Radiated Beam Patterns

Design of Monolithic 2D Optical Phased Arrays Heterogeneously Integrated with On-Chip Laser Arrays Based on SOI Photonic Platform

Silicon Nitride Integrated Two-Dimensional Wavelength Tuning Optical Phased Array

Laser scanning based on nanofabrication for ion beam photogrammetry mapping analysis using carbon coated optical silicon insulator

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Sparse 2-D Optical Phased Array with Large Grating-Lobe-free Steering Range Based on an Aperiodic Grid.

Increasing the Field-of-View Radiation Efficiency of Optical Phased Antenna Arrays

Energy-efficient integrated silicon optical phased array

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

Development, calibration and characterization of silicon photonics based optical phased arrays

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters